IP Library › Granted Patent US 6,638,859
Granted Patent Utility
US 6,638,859 · Confirmation No. 6125

APPARATUS AND METHOD TO ACHIEVE CONTINUOUS INTERFACE AND ULTRATHIN FILM DURING ATOMIC LAYER DEPOSITION

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2018-05-14 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2018-05-14 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2018-05-04 PA.. Power of Attorney 1 View
2018-05-04 N417 Electronic Filing System Acknowledgment Receipt 2 View
2018-05-04 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2003-11-11 LET. Miscellaneous Incoming Letter 1 View
2003-08-26 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-09-27 TRNA Transmittal of New Application 2 View
2002-09-27 A.PE Preliminary Amendment 2 View
2002-09-27 SPEC Specification 20 View
2002-09-27 CLM Claims 15 View
2002-09-27 ABST Abstract 1 View
2002-09-27 DRW Drawings-only black and white line drawings 4 View
2002-09-27 OATH Oath or Declaration filed 5 View
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Quick Facts
Patent No.
US 6,638,859
App. No.
10/256,899
Filed
2002-09-27
Granted
2003-10-28
Pub. No.
US20030027431A1
Art Unit
2812
PTA
-6 days