Granted Patent
Utility
US 6,650,958
· Confirmation No. 8854
INTEGRATED PROCESS TOOL MONITORING SYSTEM FOR SEMICONDUCTOR FABRICATION
Inventors:
Attila Balazs, Bruce Whitefield, Hiroshi Mizuno, Russell Whaley, Paul Szasz, Steven Reder
Patented Case
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-08-13 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-08-13 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2003-08-13 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2002-10-30 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-10-30 | ADS |
Application Data Sheet | 3 | View | |
| 2002-10-30 | SPEC |
Specification | 10 | View | |
| 2002-10-30 | CLM |
Claims | 4 | View | |
| 2002-10-30 | ABST |
Abstract | 1 | View | |
| 2002-10-30 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2002-10-30 | OATH |
Oath or Declaration filed | 2 | View | |
| 2002-10-30 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Attila Balazs
Clackamas, OR
Bruce Whitefield
Camas, WA
Hiroshi Mizuno
Gresham, OR
Russell Whaley
Gresham, OR
Paul Szasz
Gresham, OR
Steven Reder
Boring, OR
Attorneys & Agents of Record
Classification
USPC
700/121
G05B19/41875
Y02P90/02
G05B2219/31422
G05B2219/32209
G05B2219/45031
Prosecution
- Examiner
- LEE, DOUGLAS S
- Art Unit
- 2125
- Customer No.
- 24319
- Docket No.
- 02-0337
- Confirmation No.
- 8854
Patent Term Adjustment
0days
No related applications found.
RELEASE OF SECURITY INTEREST
Recorded 2022-04-15
SECURITY INTEREST
Recorded 2018-02-01
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2017-12-17
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS
Recorded 2017-02-03
PATENT SECURITY AGREEMENT
Recorded 2016-02-11
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENT RIGHTS (RELEASES RF 032856-0031)
Recorded 2016-02-02
from
LSI CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-04-03
PATENT SECURITY AGREEMENT
Recorded 2014-05-08
from
BALAZS, ATTILA,
MIZUNO, HIROSHI,
REDER, STEVEN,
SZASZ, PAUL,
WHALEY, RUSSELL,
WHITEFIELD, BRUCE
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-10-30
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Quick Facts
- Patent No.
- US 6,650,958
- App. No.
- 10/283,688
- Filed
- 2002-10-30
- Granted
- 2003-11-18
- Examiner
- LEE, DOUGLAS S
- Art Unit
- 2125
- PTA
- 0 days
External Links