Apparatus and method for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs
View Patent ↗An apparatus for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs, has at least one cleaning unit and at least one storage unit for the carriers containing the disk-shaped items. The apparatus further has at least one sorting unit for the disk-shaped items. The cleaning unit, the storage unit and the sorting apparatus are integral component parts of the apparatus and are operated by a common automatic control.
1. An apparatus for handling, storing and reloading carriers for disk-shaped items, the apparatus comprising:
at least one cleaning unit;
at least one storage unit for storing the carriers, said storage unit having a first load opening for receiving the carriers and a second load opening for outputting the carriers; and
at least one sorting unit for sorting the disk-shaped items, said cleaning unit, said storage unit and said sorting unit being integral component parts and operated by a common automatic control, said sorting unit having at least two mechanical interfaces for respectively feeding and carrying away the disk-shaped items; and
said first load opening being connected to a first of said two mechanical interfaces of said sorting unit for feeding the disk-shaped items to said sorting unit and said second load opening being connected to a second of said two mechanical interfaces of said sorting unit for outputting the disk-shaped items into a carrier.
2. The apparatus according to claim 1 , further comprising at least one measuring unit for measuring the carriers.
3. The apparatus according to claim 1 , wherein said cleaning unit cleans a number of the carriers simultaneously.
4. The apparatus according to claim 1 , wherein the disk-shaped items are selected from the group consisting of semiconductor wafers and CDs.
5. The apparatus according to claim 1 , further comprising:
at least one data recognition unit disposed in said storage unit; and
at least one data allocation unit disposed in each of the carriers.
6. The apparatus according to claim 1 , further comprising at least one identification and path-indicating unit for the disk-shaped items and disposed in said sorting unit.
7. The apparatus according to claim 1 , wherein said sorting unit has an opening mechanism for boxes in which the carriers of the disk-shaped items are held.
8. The apparatus according to claim 1 , wherein said cleaning unit cleans one of the carriers at a time.
9. A method for handling, storing and cleaning carriers for disk-shaped items, which comprises the steps of:
providing an apparatus having a cleaning unit, a storage unit and a sorting unit;
feeding a carrier containing disk-shaped items to a first loading opening of the storage unit connected to a first mechanical interface of the sorting unit;
using the sorting unit for removing the disk-shaped items from the carrier and feeding the disk-shaped items into the sorting unit through the first mechanical interface and removing the disk-shaped items from the sorting unit through a second mechanical interface of the sorting unit to a further carrier;
outputting the further carrier through a second loading opening of the storage unit connected to the second mechanical interface;
feeding emptied carrier to the cleaning unit;
cleaning the carrier in the cleaning unit resulting in a cleaned carrier; and
feeding the cleaned carrier to the storage unit where the cleaned carrier can be reloaded with additional disk-shaped items.
10. The method according to claim 9 , which comprises measuring the carrier after performing the cleaning step.
11. The method according to claim 9 , which comprises feeding the further carrier with the disk-shaped items to other processing units.