Granted Patent
Utility
US 6,638,410
· Confirmation No. 2481
APPARATUS AND METHOD FOR ELECTROLYTICALLY DEPOSITING COPPER ON A SEMICONDUCTOR WORKPIECE
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2007-05-31 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2003-07-09 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-07-09 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2002-11-22 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-11-22 | ADS |
Application Data Sheet | 2 | View | |
| 2002-11-22 | A.PE |
Preliminary Amendment | 17 | View | |
| 2002-11-22 | SPEC |
Specification | 21 | View | |
| 2002-11-22 | CLM |
Claims | 10 | View | |
| 2002-11-22 | ABST |
Abstract | 1 | View | |
| 2002-11-22 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2002-11-22 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Linlin Chen
Plano, TX
Thomas Taylor
West Borough, MA
Attorneys & Agents of Record
Classification
USPC
205/157
H10W20/033
H10W20/043
H10W20/041
H10P14/47
H10W20/0425
H05K3/423
Prosecution
- Examiner
- PARSONS, THOMAS H
- Art Unit
- 1745
- Customer No.
- 50689
- Docket No.
- 29195-8171US02
- Confirmation No.
- 2481
Publication
- Pub. No.
- US20030155249A1
- Pub. Date
- 2003-08-21
Patent Term Adjustment
-112days
Parent
is a Continuation of
→
App. 09/694,413
· US 6,632,345
Filed 2000-10-23
· Patented Case
Parent
is a Division of
→
App. 09/045,245
· US 6,197,181
Filed 1998-03-20
· Patented Case
Child
is a Continuation of
→
App. 10/417,086
Filed 2003-04-17
· Expressly Abandoned -- During Examination
Child
is a Continuation of
→
App. 10/695,419
· US 6,932,892
Filed 2003-10-27
· Patented Case
Child
is a Continuation of
→
App. 10/446,047
Filed 2003-05-28
· Abandoned -- Failure to Respond to an Office Action
Child
is a Continuation of
→
App. 10/448,982
Filed 2003-05-31
· Expressly Abandoned -- During Examination
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-05-05
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Quick Facts
- Patent No.
- US 6,638,410
- App. No.
- 10/302,711
- Filed
- 2002-11-22
- Granted
- 2003-10-28
- Pub. No.
- US20030155249A1
- Examiner
- PARSONS, THOMAS H
- Art Unit
- 1745
- PTA
- -112 days
External Links