Film forming apparatus, film forming method and tray for substrate
View Patent ↗The object of the present invention is to provide an apparatus suitable for forming a thick film having a thickness on a surface of a substrate such as a glass substrate, a semiconductor wafer or the like. In the apparatus according to the present invention, a stock station for a substrate and a treatment station for a substrate are adjacent to each other, portions for coating, film-forming, cleaning and drying are provided in the treatment station, a tray having a concave portion for accommodating a substrate defined on the surface thereof is provided, and a transfer device circulates the tray around the portions for coating, film-forming, cleaning and drying.
1. An apparatus for forming a film comprising:
a stock station which stocks a substrate;
a tray which supports the substrate and having a concave portion for accommodating the substrate defined on the surface thereof;
a treatment station which treats a substrate, said treatment station being disposed adjacent to said stock station and including portions for coating the substrate, film-forming on the substrate, cleaning said tray and drying said tray; and
a transfer device circulating said tray among said portions for coating, film-forming, cleaning and drying operations.
2. The apparatus for forming a film according to claim 1 , wherein said coating portion includes a squeegee for making the thickness of an applied coating liquid uniform.
3. The apparatus for forming a film according to claim 2 , wherein said coating portion further includes a coating device having a slit nozzle, and said squeegee is attached to said coating device.
4. The apparatus for forming a film according to claim 1 , wherein the tray comprises an outer member having an annular shape; and an inner member, wherein a concave portion for accommodating the substrate is defined by attaching said inner member to said outer member so as to cover the opening of said outer member, and wherein the position of said inner member is allowed to be adjusted with respect to said outer member in the thickness direction.
5. The apparatus for forming a film according to claim 4 , wherein a passage used for vacuum suction and for gas-blowing release is provided in said inner member.
6. The apparatus for forming a film according to claim 5 , wherein a coupler is provided to couple said passage to a vacuum source or a compressed-air source.
7. The apparatus for forming a film according to claim 1 , wherein said transfer device is adapted to successively move the tray between said portions of said treatment station.
8. The apparatus for forming a film according to claim 1 , wherein said transfer device feeds said tray sequentially from the coating portion, to the film forming portion, to the cleaning portion, and to the drying portion.
9. The apparatus for forming a film according to claim 1 , wherein said said apparatus forms a thick film of an applied coating liquid.
10. An apparatus for forming a film comprising:
a stock station for a substrate; a treatment station for the substrate adjacent to said stock station; portions for coating the substrate, film-forming on the substrate, cleaning and drying a substrate support tray being provided in said treatment station; said tray having a concave portion for accommodating a substrate defined on the surface thereof; a transfer device which circulates said tray among said portions for coating, film-forming, cleaning and drying operations; and
a handling device provided in said stock station to transfer, pass, and receive the substrate with respect to said treatment station, said handling device comprising a pair of hands, and said hands are supported by a member which is rotatable based on an inclined axis in a state where said hands are at 90 degrees with respect to each other.