Patent Application
Utility
App. No. 10/322,974
· Confirmation No. 6699
Substrate processing system
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2022-04-15 | OATH |
Oath or Declaration filed | 236 | View | |
| 2004-03-24 | ABN |
Abandonment | 2 | View | |
| 2003-12-04 | CTAV |
Advisory Action (PTOL-303) | 3 | View | |
| 2003-12-04 | FWCLM |
Index of Claims | 1 | View | |
| 2003-09-23 | A.NE |
Response After Final Action | 1 | View | |
| 2003-09-23 | CLM |
Claims | 3 | View | |
| 2003-09-23 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2003-07-25 | CTFR |
Final Rejection | 7 | View | |
| 2003-07-22 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2003-05-22 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2003-05-22 | CLM |
Claims | 3 | View | |
| 2003-05-22 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2003-02-24 | CTNF |
Non-Final Rejection | 6 | View | |
| 2003-02-24 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-02-24 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-02-20 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2002-12-18 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-12-18 | SPEC |
Specification | 11 | View | |
| 2002-12-18 | CLM |
Claims | 6 | View | |
| 2002-12-18 | ABST |
Abstract | 1 | View | |
| 2002-12-18 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2002-12-18 | OATH |
Oath or Declaration filed | 12 | View | |
| 2002-12-18 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2002-12-18 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2002-12-18 | FWCLM |
Index of Claims | 1 | View | |
| 2002-12-18 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-12-18 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2002-12-18 | SPEC |
Specification | 11 | View | |
| 2002-12-18 | CLM |
Claims | 6 | View | |
| 2002-12-18 | ABST |
Abstract | 1 | View | |
| 2002-12-18 | OATH |
Oath or Declaration filed | 12 | View | |
| 2002-12-18 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-12-18 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-12-18 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2002-12-18 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2002-12-18 | FOR |
Foreign Reference | 8 | View |
Inventors
Kiran Kumar
Sunnyvale, CA
Zhihai Wang
Sunnyvale, CA
Rudy Rios
San Jose, CA
Wilbur G. Catabay
Saratoga, CA
Richard D. Schinella
Saratoga, CA
Attorneys & Agents of Record
Classification
USPC
156/345.31
H10P72/0454
H10W20/033
H10P72/0402
H10W20/081
H10P72/0466
C23C14/566
C23C16/4401
Prosecution
- Examiner
- MOORE, KARLA A
- Art Unit
- 1763
- Customer No.
- 24319
- Docket No.
- 00-627/1D
- Confirmation No.
- 6699
Publication
- Pub. No.
- US20030084587A1
- Pub. Date
- 2003-05-08
RELEASE OF SECURITY INTEREST
Recorded 2022-04-15
SECURITY INTEREST
Recorded 2018-02-01
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2017-12-17
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Quick Facts
- App. No.
- 10/322,974
- Filed
- 2002-12-18
- Pub. No.
- US20030084587A1
- Examiner
- MOORE, KARLA A
- Art Unit
- 1763
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