IP Library › Granted Patent US 6,518,193
Granted Patent Utility
US 6,518,193 · Confirmation No. 5412

SUBSTRATE PROCESSING SYSTEM

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2022-04-15 OATH Oath or Declaration filed 236 View
2001-03-09 TRNA Transmittal of New Application 1 View
2001-03-09 SPEC Specification 11 View
2001-03-09 CLM Claims 6 View
2001-03-09 ABST Abstract 1 View
2001-03-09 DRW Drawings-only black and white line drawings 2 View
2001-03-09 OATH Oath or Declaration filed 6 View
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Quick Facts
Patent No.
US 6,518,193
App. No.
09/802,424
Filed
2001-03-09
Granted
2003-02-11
Art Unit
2823
PTA
-35 days