Method for fabricating a flux concentrating system for use in a magnetoelectronics device
View Patent ↗A method for fabricating a flux concentrating system ( 62 ) for use in a magnetoelectronics device is provided. The method comprises the steps of providing a bit line ( 10 ) formed in a substrate ( 12 ) and forming a first material layer ( 24 ) overlying the bit line ( 10 ) and the substrate ( 12 ). Etching is performed to form a trench ( 58 ) in the first material layer ( 24 ) and a cladding layer ( 56 ) is deposited in the trench ( 52 ). A buffer material layer ( 58 ) is formed overlying the cladding layer ( 56 ) and a portion of the buffer material layer ( 58 ) and a portion of the cladding layer ( 56 ) is removed.
1. A method for fabricating a flux concentrating system for use in a magnetoelectronics device, the method comprising the steps of:
providing a bit line formed in a substrate, wherein said bit line overlies and is magnetically coupled to a magnetoelectronic element or a magnetic memory unit;
forming a first material layer overlying said bit line and said substrate;
etching to form a trench in said first material layer, said trench disposed proximate to said bit line;
depositing a cladding layer in said trench, said cladding layer having at least one side surface and a bottom surface and configured to direct magnetic flux produced by a current flowing through said bit line;
forming a buffer material layer proximate to said at least one side surface and overlying said bottom surface of said cladding layer; and
removing a portion of said buffer material layer and a portion of said cladding layer.
2. The method of claim 1 , wherein the step of forming said first material layer comprises forming said first material layer from at least one of plasma-enhanced silicon nitride (PEN), tetraethylorthosilicate (TEOS), silicon nitride (SiN), aluminum nitride (AlN), silicon carbide (SiC), silicon carbon nitride (SiCN), silicon carbon oxyhydride (SiCOH) and silicon oxynitride (SiON).
3. The method of claim 1 , further comprising the step of forming a second material layer overlying said bit line and said substrate before the step of forming said first material layer.
4. The method of claim 3 , further comprising the step of selecting said first material layer and said second material layer such that said second material layer serves as an etch stop when said first material layer is etched.
5. The method of claim 3 , wherein the step of forming said first material layer comprises forming said first material layer from at least one of plasma-enhanced silicon nitride (PEN), tetraethyl orthosilicate (TEOS), silicon nitride (SiN), aluminum nitride (AlN), silicon carbide (SiC), silicon carbon nitride (SiCN), silicon carbon oxyhydride (SiCOH) and silicon oxynitride (SiON).
6. The method of claim 3 , wherein the step of forming said second material layer comprises forming said second material layer from at least one of plasma-enhanced silicon nitride (PEN), tetraethyl orthosilicate (TEOS), silicon nitride (SiN), aluminum nitride (AlN), silicon carbide (SiC), silicon carbon nitride (SiCN), silicon carbon oxyhydride (SiCOH) and silicon oxynitride (SiON).
7. The method of claim 3 , wherein the step of forming said second material layer comprises forming said second material layer of plasma-enhanced nitride and the step of forming said first material layer comprises forming said first material layer from tetraethyl orthosilicate.
8. The method of claim 1 , the step of etching comprising etching by dry plasma etching.
9. The method of claim 3 , the step of etching comprising etching by dry plasma etching.
10. The method of claim 1 , the step of depositing a cladding layer comprising depositing a flux concentrating layer that is an electrically conducting magnetic material having sufficiently high permeability to concentrate magnetic flux to a desired area.
11. The method of claim 10 , the step of depositing a cladding layer comprising depositing a flux concentrating layer formed of nickel iron (NiFe).
12. The method of claim 1 , the step of removing a portion of said buffer material layer and a portion of said cladding layer comprising removing by chemical mechanical planarization.
13. The method of claim 3 , wherein the step of etching comprises etching said first material layer with a dry plasma etch and etching said first and second material layers using a wet etch chemistry that causes said second material layer to etch significantly faster than said first material layer, said etching forming a trench in said first and second material layers.
14. The method of claim 13 , wherein the step of forming said second material layer comprises forming said second material layer of plasma-enhanced nitride and the step of forming said first material layer comprises forming said first material layer from tetraethyl orthosilicate.
15. The method of claim 13 , wherein the step of depositing a cladding layer within said trench comprises depositing a discontinuous cladding layer.
16. The method of claim 13 , wherein the step of etching further comprises an overetching of said second material layer of about 100%.
17. The method of claim 13 , wherein the step of etching further comprises an overetching of said second material layer of about 0%–50%.
18. The method of claim 1 , wherein the step of providing a bit line comprises providing a bit line comprising a conducting line having a first surface and a second surface and a cladding layer that is positioned adjacent said first and second surfaces of said conducting line.
19. The method of claim 13 , further comprising the step of forming an insulator barrier layer in said trench before the step of depositing a cladding layer.