IP Library › Granted Patent US 6,727,565
Granted Patent Utility
US 6,727,565 · Confirmation No. 2566

MANUFACTURING METHOD FOR EXPOSURE MASK, GENERATING METHOD FOR MASK SUBSTRATE INFORMATION, MASK SUBSTRATE, EXPOSURE MASK, MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE AND SERVER

Inventor: Masamitsu Itoh
Patented Case View Patent ↗ View Publication ↗
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2008-05-07 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2008-04-02 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2004-01-15 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-10-16 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-10-16 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-10-16 1449 List of References cited by applicant and considered by examiner 1 View
2003-10-16 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-10-16 FWCLM Index of Claims 1 View
2003-10-16 SRFW Search information including classification, databases and other search related notes 1 View
2003-09-16 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-09-16 FOR Foreign Reference 20 View
2003-09-16 FOR Foreign Reference 18 View
2003-09-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-09-10 CLM Claims 3 View
2003-09-10 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2003-06-10 CTNF Non-Final Rejection 7 View
2003-06-10 892 List of references cited by examiner 1 View
2003-06-10 1449 List of References cited by applicant and considered by examiner 1 View
2003-05-28 SRNT Examiner's search strategy and results 3 View
2003-05-14 SRNT Examiner's search strategy and results 2 View
2003-01-31 TRNA Transmittal of New Application 4 View
2003-01-31 A.PE Preliminary Amendment 4 View
2003-01-31 SPEC Specification 42 View
2003-01-31 CLM Claims 10 View
2003-01-31 ABST Abstract 1 View
2003-01-31 DRW Drawings-only black and white line drawings 6 View
2003-01-31 OATH Oath or Declaration filed 2 View
2003-01-31 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-01-31 SRFW Search information including classification, databases and other search related notes 1 View
2003-01-31 FWCLM Index of Claims 1 View
2003-01-31 TRNA Transmittal of New Application 5 View
2003-01-31 DRW Drawings-only black and white line drawings 6 View
2003-01-31 SPEC Specification 42 View
2003-01-31 CLM Claims 10 View
2003-01-31 ABST Abstract 1 View
2003-01-31 OATH Oath or Declaration filed 2 View
2003-01-31 WFEE Fee Worksheet (SB06) 1 View
2003-01-31 WFEE Fee Worksheet (SB06) 1 View
2003-01-31 WCLM Claims Worksheet (PTO-2022) 1 View
2003-01-31 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-01-31 LET. Miscellaneous Incoming Letter 2 View
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Quick Facts
Patent No.
US 6,727,565
App. No.
10/355,215
Filed
2003-01-31
Granted
2004-04-27
Pub. No.
US20030153114A1
Art Unit
2818
PTA
-6 days