Granted Patent
Utility
US 6,537,844
· Confirmation No. 8351
MANUFACTURING METHOD FOR EXPOSURE MASK, GENERATING METHOD FOR MASK SUBSTRATE INFORMATION , MASK SUBSTRATE, EXPOSURE MASK, MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE AND SERVER
Inventor:
Masamitsu Itoh
Patented Case
View Patent ↗
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-03-05 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-03-05 | SPEC |
Specification | 42 | View | |
| 2002-03-05 | CLM |
Claims | 10 | View | |
| 2002-03-05 | ABST |
Abstract | 1 | View | |
| 2002-03-05 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2002-03-05 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Masamitsu Itoh
Yokohama-shi, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/48
G03F7/707
G03F1/60
G03F7/703
G03F7/70433
G03F7/70783
Y10S438/975
Prosecution
- Examiner
- NGUYEN, THINH T
- Art Unit
- 2818
- Docket No.
- 04329.2754
- Confirmation No.
- 8351
Foreign Priority
2001-164695
·
2001-05-31
·
JAPAN
Patent Term Adjustment
-54days
Child
is a Division of
→
App. 13/525,712
· US 8,465,907
Filed 2012-06-18
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Division of
→
App. 10/355,215
· US 6,727,565
Filed 2003-01-31
· Patented Case
Child
is a Division of
→
App. 12/232,567
· US 7,998,759
Filed 2008-09-19
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Division of
→
App. 13/177,143
· US 8,222,051
Filed 2011-07-06
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Division of
→
App. 10/756,347
· US 7,060,519
Filed 2004-01-14
· Patented Case
Child
is a Division of
→
App. 11/147,232
· US 7,435,609
Filed 2005-06-08
· Patented Case
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2017-08-24
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Quick Facts
- Patent No.
- US 6,537,844
- App. No.
- 10/087,860
- Filed
- 2002-03-05
- Granted
- 2003-03-25
- Examiner
- NGUYEN, THINH T
- Art Unit
- 2818
- PTA
- -54 days
External Links