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App. No. 10/356,791 · Confirmation No. 3210

FLUORINE-CONTAINING PHOTORESIST HAVING REACTIVE ANCHORS FOR CHEMICAL AMPLIFICATION AND IMPROVED COPOLYMERIZATION PROPERTIES

Inventor: Jorg Rottstegge
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-11-15 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-08-11 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-08-11 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-08-11 EXIN Examiner Interview Summary Record (PTOL - 413) 1 View
2004-08-11 BIB Bibliographic Data Sheet 2 View
2004-08-11 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-08-11 FWCLM Index of Claims 1 View
2004-08-11 SRFW Search information including classification, databases and other search related notes 1 View
2004-07-15 FR TRANS Translation of Foreign Priority Documents 38 View
2004-07-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2004-07-12 SPEC Specification 2 View
2004-07-12 CLM Claims 4 View
2004-07-12 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2004-03-11 CTNF Non-Final Rejection 20 View
2004-03-11 1449 List of References cited by applicant and considered by examiner 2 View
2004-03-11 892 List of references cited by examiner 1 View
2004-03-11 FWCLM Index of Claims 1 View
2004-03-11 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-21 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-11-21 PA.. Power of Attorney 1 View
2003-11-21 FOR Foreign Reference 22 View
2003-04-22 CFILE Request for Corrected Filing Receipt 4 View
2003-03-24 PA.. Power of Attorney 1 View
2003-03-24 FRPR Certified Copy of Foreign Priority Application 41 View
2003-03-17 LET. Miscellaneous Incoming Letter 1 View
2003-03-17 OATH Oath or Declaration filed 2 View
2003-01-31 TRNA Transmittal of New Application 2 View
2003-01-31 SPEC Specification 42 View
2003-01-31 CLM Claims 4 View
2003-01-31 ABST Abstract 1 View
2003-01-31 OATH Oath or Declaration filed 2 View
2003-01-31 WFEE Fee Worksheet (SB06) 1 View
2003-01-31 WFEE Fee Worksheet (SB06) 1 View
2003-01-31 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-01-31 FOR Foreign Reference 22 View
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Quick Facts
App. No.
10/356,791
Filed
2003-01-31
Granted
2004-12-28
Pub. No.
US20030157432A1
Examiner
LEE, SIN J
Art Unit
1752
PTA
-35 days