Device for supporting thin semiconductor wafers
View Patent ↗A device for supporting and securing thin wafers comprising a housing having an upper shelf extending radially inwardly from the housing and a lower shelf extending radially inwardly from the upper shelf. An upper seal is disposed within the upper shelf and an inspection windowpane is disposed within the lower shelf. A vacuum is provided between the inspection windowpane and the upper seal to secure the wafer to the inspection windowpane and to secure the inspection windowpane to the housing. A ring-shaped frame assembly may further support and secure the wafer.
1. A device for supporting thin wafers, said device comprising:
a housing comprising an annular frame having an upper shelf extending radially inwardly from the frame and a lower shelf extending radially inwardly from the upper shelf;
an inspection windowpane disposed on the lower shelf;
an upper seal comprising a resilient ring, said upper seal sized to fit on the upper shelf, said resilient ring having a flange extending radially inwardly over the inspection windowpane;
a channel disposed within the housing, said channel providing fluid communication between the exterior of the housing and the interior of the housing;
wherein a vacuum communicated to the channel creates a sealed space between the housing, upper seal and the windowpane.
2. The device of claim 1 further comprising a ring seal disposed on the upper surface of the lower shelf, beneath the inspection windowpane.
3. The device of claim 1 wherein the inspection windowpane is provided with one or more openings suitable to receive a probe used during failure analysis.
4. A device for holding a wafer comprising an annular frame having an annular space in the inner diameter of the frame, said space being sized and dimensioned to receive the outer perimeter of a wafer, and a means for applying vacuum to the space, wherein at least a portion of the annular frame is resilient such that application of vacuum to the space causes the portion of the annular frame to be drawn toward the perimeter of the wafer.