Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide
View Patent ↗A method is provided for forming a film of ruthenium or ruthenium oxide to the surface of a substrate by employing the techniques of chemical vapor deposition to decompose ruthenium precursor formulations. The ruthenium precursor formulations of the present invention include a ruthenium precursor compound and a solvent capable of solubilizing the ruthenium precursor compound. A method is further provided for making a vaporized ruthenium precursor for use in the chemical vapor deposition of ruthenium and ruthenium-containing materials onto substrates, wherein a ruthenium precursor formulation having a ruthenium-containing precursor compound and a solvent capable of solubilizing the ruthenium-containing precursor compound is vaporized.
1. A solvated ruthenium precursor formulation comprising:
a tricarbonyl ruthenium compound containing an oxidizing agent; and
a solvent capable of solubilizing said tricarbonyl ruthenium compound.
2. The formulation of claim 1 , wherein said solvated ruthenium precursor formulation is a liquid.
3. The formulation of claim 1 , wherein said solvated ruthenium precursor formulation has a freezing point around room temperature.
4. The formulation of claim 1 , wherein said solvated ruthenium precursor formulation decomposes at a temperature greater than room temperature.
5. The formulation of claim 1 , wherein said oxidizing agent consists of a compound selected from the group consisting of O 2 , N 2 O, O 3 , NO, NO 2 , H 2 O 2 , H 2 O, SO 2 , SO 3 , organic peroxides, and combinations thereof.
6. The formulation of claim 1 , wherein said solvated ruthenium precursor formulation further contains oxygen.
7. The formulation of claim 1 , wherein said solvated ruthenium precursor formulation further contains N 2 O.
8. The formulation of claim 1 , wherein said solvent is selected from the group consisting of hexane, pentane, heptane, and butylacetate.
9. A solvated ruthenium precursor formulation comprising:
an oxidized ruthenium compound; and
a solvent selected from the group consisting of hexane, pentane, heptane, and butylacetate.
10. The formulation of claim 9 , wherein said solvated ruthenium precursor formulation contains an oxidizing agent.
11. The formulation of claim 10 , wherein said oxidized ruthenium compound includes an oxidizing group selected from the group consisting of O 2 , N 2 O, O 3 , NO, NO 2 , H 2 O 2 , H 2 O, SO 2 , SO 3 , organic peroxides, and combinations thereof.
12. The formulation of claim 9 , wherein said solvated ruthenium precursor formulation further contains oxygen.
13. A solvated ruthenium precursor formulation comprising:
cyclohexadienetricarbonyl ruthenium;
a solvent selected from the group consisting of hexane, pentane, heptane, and butylacetate; and
an oxidizing agent.
14. The formulation of claim 13 , wherein said cyclohexadienetricarbonyl ruthenium is a liquid.
15. The formulation of claim 13 , wherein said solvated ruthenium precursor formulation has a freezing point around room temperature.
16. The formulation of claim 13 , wherein said solvated ruthenium precursor formulation decomposes at a temperature greater than room temperature.
17. The formulation of claim 13 , wherein said cyclohexadienetricarbonyl ruthenium is tricarbonyl ruthenium.
18. The formulation of claim 13 , wherein said solvated ruthenium precursor formulation contains an oxidizing agent.
19. The formulation of claim 13 , wherein said oxidizing agent consists of a compound selected from the group consisting of O 2 , N 2 O, O 3 , NO, NO 2 , H 2 O 2 , H 2 O, SO 2 , SO 3 , organic peroxides, and combinations thereof.
20. The formulation of claim 13 , wherein said cyclohexadienetricarbonyl ruthenium is tricarbonyl (1,2,3,4-η)-1,3-cyclohexadiene ruthenium.