IP Library › Granted Patent US 6,770,541
Granted Patent Utility
US 6,770,541 · Confirmation No. 8610

METHOD FOR HARD MASK REMOVAL FOR DEEP TRENCH ISOLATION AND RELATED STRUCTURE

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2016-08-23 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2016-08-23 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2016-08-18 C.AD Change of Address 1 View
2016-08-18 PA.. Power of Attorney 1 View
2016-08-18 MFEE.C.AD Maintenance Fee Address Change 1 View
2016-08-18 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-03-27 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2004-05-13 IFEE Issue Fee Payment (PTO-85B) 3 View
2004-05-05 NOA Notice of Allowance and Fees Due (PTOL-85) 6 View
2004-05-05 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-05-05 SRFW Search information including classification, databases and other search related notes 1 View
2004-05-05 FWCLM Index of Claims 1 View
2004-04-14 WFEE Fee Worksheet (SB06) 1 View
2004-04-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-04-12 CLM Claims 2 View
2004-04-12 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2004-04-12 LET. Miscellaneous Incoming Letter 2 View
2004-04-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 4 View
2004-04-08 CLM Claims 2 View
2004-04-08 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2003-12-09 CTNF Non-Final Rejection 8 View
2003-12-09 892 List of references cited by examiner 1 View
2003-12-09 FWCLM Index of Claims 1 View
2003-12-09 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-26 SRNT Examiner's search strategy and results 3 View
2003-10-24 WFEE Fee Worksheet (SB06) 1 View
2003-10-24 FWCLM Index of Claims 1 View
2003-09-22 ELC. Response to Election / Restriction Filed 1 View
2003-09-22 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-09-08 CTRS Requirement for Restriction/Election 4 View
2003-09-08 FWCLM Index of Claims 1 View
2003-06-10 C.AD Change of Address 1 View
2003-02-20 TRNA Transmittal of New Application 3 View
2003-02-20 SPEC Specification 19 View
2003-02-20 CLM Claims 4 View
2003-02-20 ABST Abstract 1 View
2003-02-20 DRW Drawings-only black and white line drawings 8 View
2003-02-20 OATH Oath or Declaration filed 3 View
2003-02-20 WFEE Fee Worksheet (SB06) 1 View
2003-02-20 WFEE Fee Worksheet (SB06) 1 View
2003-02-20 WCLM Claims Worksheet (PTO-2022) 1 View
2003-02-20 TRNA Transmittal of New Application 3 View
2003-02-20 SPEC Specification 19 View
2003-02-20 CLM Claims 4 View
2003-02-20 ABST Abstract 1 View
2003-02-20 DRW Drawings-only black and white line drawings 8 View
2003-02-20 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,770,541
App. No.
10/371,416
Filed
2003-02-20
Granted
2004-08-03
Art Unit
2814
PTA
-30 days