Method for producing water for use in manufacturing semiconductors
View Patent ↗Disclosed is a process of treating semiconductor substrates, including the production of pure water, a method of producing the pure water for semiconductor fabrication, and a water-producing apparatus. Ammonia is catalytically oxidized in a catalytic conversion reactor to form pure water. The water is then supplied to a semiconductor fabrication process. The water-producing apparatus comprises a housing surrounding a catalytic material for adsorbing ammonia, an ammonia and oxidant source, each in communication with the housing, and an outlet for reaction products. The outlet is connected to a semiconductor processing apparatus. According to preferred embodiments of the invention, the apparatus can be a catalytic tube reactor, a fixed bed reactor or a fluidized bed reactor. This process and apparatus allows the quantity of unreacted excess oxidant to be limited, preventing undesired oxidation of low oxidation resistant metal gate electrodes during semiconductor fabrication processes, such as during wet oxidation processes like source/drain reoxidation. At the same time, the use of ammonia reactants lessens the risk of dangerous explosions and excessive boron diffusion while fabricating surface p-channel semiconductor devices.
1. A process of treating a semiconductor substrate, the process comprising:
providing ammonia and an oxidant to a first location at a predetermined molar ratio of ammonia to oxidant;
catalytically reacting the oxidant and the ammonia to form water at the first location wherein the predetermined molar ratio is selected to minimize a quantity of unreacted oxidant; and
supplying said water to a semiconductor fabrication process at a second location separate from the first location.
2. A process according to claim 1 , wherein said catalytic oxidation is performed within a temperature range of from about 180° C. to about 600° C.
3. A process according to claim 1 , wherein said catalytic oxidation is performed within a pressure range of from about 350 Torr to about 1,350 Torr.
4. A process according to claim 1 , wherein said semiconductor fabrication process comprises a wet thermal oxidation of a semiconductor substrate.
5. A process according to claim 1 , wherein said semiconductor fabrication process comprises a source/drain reoxidation.
6. A process according to claim 1 , wherein said semiconductor fabrication process comprises forming SiO x N y .
7. A process according to claim 1 , wherein said semiconductor fabrication process comprises reoxidation of high dielectric materials.
8. A process according to claim 1 , wherein said semiconductor fabrication process comprises wet bench processing of a semiconductor substrate.
9. A process according to claim 1 , wherein the oxidant comprises oxygen gas.
10. A process according to claim 9 , wherein the predetermined molar ratio is greater than about 4:3.
11. A process according to claim 9 , wherein the predetermined molar ratio is in a range between about 5:3 and about 14:3.
12. A method of producing pure water for fabrication of a semiconductor, the method comprising:
introducing ammonia and an oxidant to a catalytic conversion reactor separate from the semiconductor, the ammonia and the oxidant introduced at a predetermined molar ratio of ammonia to oxidant; and
reacting said ammonia and said oxidant to form water wherein the predetermined molar ratio is selected to minimize a quantity of unreacted oxidant.
13. The method of claim 12 , wherein oxidizing said ammonia comprises supplying oxygen gas to said catalytic reactor.
14. The method of claim 13 , wherein supplying said oxygen gas comprises simultaneously supplying ammonia and oxygen gas to said catalytic reactor.
15. The method of claim 13 , wherein supplying said oxygen gas comprises mixing said ammonia with said oxygen gas upstream of said catalytic reactor.
16. The method of claim 12 , further comprising supplying water in vapor form from said catalytic reactor to a semiconductor processing chamber.
17. The method of claim 16 , wherein said semiconductor processing chamber comprises a semiconductor substrate oxidizing chamber.
18. A method of using pure water for fabrication of a semiconductor substrate, the method comprising:
catalytically reacting ammonia and an oxidant at a predetermined molar ratio of ammonia to oxidant to form water at a first location wherein the predetermined molar ratio is selected to minimize a quantity of unreacted oxidant; and
oxidizing a portion of the semiconductor substrate by exposing the substrate to the water at a second location separate from the first location.