Patent Application
Utility
App. No. 10/424,039
· Confirmation No. 9732
APPARATUS FOR PATTERNING A SEMICONDUCTOR WAFER
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2005-04-28 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2005-02-04 | COCIN |
Request for Certificate of Correction | 4 | View | |
| 2004-09-17 | IFEE |
Issue Fee Payment (PTO-85B) | 2 | View | |
| 2004-06-29 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-06-29 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-06-29 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-06-29 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-04-22 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-04-22 | FWCLM |
Index of Claims | 1 | View | |
| 2004-04-09 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2004-04-09 | SPEC |
Specification | 3 | View | |
| 2004-04-09 | CLM |
Claims | 6 | View | |
| 2004-04-09 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2004-04-09 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2004-04-09 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2004-01-06 | CTNF |
Non-Final Rejection | 8 | View | |
| 2004-01-06 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-01-06 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-01-06 | FWCLM |
Index of Claims | 1 | View | |
| 2004-01-06 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-04-25 | TRNA |
Transmittal of New Application | 3 | View | |
| 2003-04-25 | SPEC |
Specification | 12 | View | |
| 2003-04-25 | CLM |
Claims | 6 | View | |
| 2003-04-25 | ABST |
Abstract | 1 | View | |
| 2003-04-25 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2003-04-25 | OATH |
Oath or Declaration filed | 9 | View | |
| 2003-04-25 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-04-25 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-04-25 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View |
Inventors
Oliver Genz
Dresden, GERMANY
Jurgen Preuninger
Wappingers Falls, NY
Gerhard Kunkel
Radebeul, GERMANY
Attorneys & Agents of Record
Classification
USPC
355/55
G03F7/70358
G03F7/70725
Prosecution
- Examiner
- MATHEWS, ALAN A
- Art Unit
- 2851
- Customer No.
- 25962
- Docket No.
- 2003 P 51470 US
- Confirmation No.
- 9732
Publication
- Pub. No.
- US20030218727A1
- Pub. Date
- 2003-11-27
Patent Term Adjustment
-3days
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Quick Facts
- App. No.
- 10/424,039
- Filed
- 2003-04-25
- Granted
- 2004-10-26
- Pub. No.
- US20030218727A1
- Examiner
- MATHEWS, ALAN A
- Art Unit
- 2851
- PTA
- -3 days
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