Granted Patent
Utility
US 6,558,883
· Confirmation No. 2877
APPARATUS AND METHOD FOR PATTERNING A SEMICONDUCTOR WAFER
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-04-16 | SPEC |
Specification | 1 | View | |
| 2001-04-16 | CLM |
Claims | 4 | View | |
| 2001-04-16 | ABST |
Abstract | 1 | View | |
| 2001-04-16 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-03-08 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-03-08 | A.PE |
Preliminary Amendment | 10 | View | |
| 2001-03-08 | SPEC |
Specification | 12 | View | |
| 2001-03-08 | CLM |
Claims | 4 | View | |
| 2001-03-08 | ABST |
Abstract | 1 | View | |
| 2001-03-08 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-03-08 | OATH |
Oath or Declaration filed | 9 | View | |
| 2001-03-08 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Oliver Genz
Dresden, GERMANY
Jurgen Preuninger
Wappingers Falls, NY
Gerhard Kunkel
Radebeul, GERMANY
Attorneys & Agents of Record
Classification
USPC
430/397
G03F7/70358
G03F7/70725
Prosecution
- Examiner
- DUDA, KATHLEEN
- Art Unit
- 1756
- Customer No.
- 25962
- Docket No.
- SIE 01 P 7499
- Confirmation No.
- 2877
Publication
- Pub. No.
- US20020127501A1
- Pub. Date
- 2002-09-12
Patent Term Adjustment
-12days
RELEASE OF SECURITY INTEREST
Recorded 2020-11-06
RELEASE OF U.S. PATENT AGREEMENT (FOR NON-U.S. GRANTORS)
Recorded 2018-10-12
AMENDED AND RESTATED U.S. PATENT SECURITY AGREEMENT (FOR NON-U.S. GRANTORS)
Recorded 2018-08-22
U.S. PATENT SECURITY AGREEMENT (FOR NON-U.S. GRANTORS)
Recorded 2014-09-09
CHANGE OF ADDRESS
Recorded 2014-09-03
CONVERSANT INTELLECTUAL PROPERTY MANAGEMENT INC.,
CONVERSANT IP N.B. 868 INC.,
CONVERSANT IP N.B. 276 INC.
from
ROYAL BANK OF CANADA
RELEASE OF SECURITY INTEREST
Recorded 2014-08-07
CHANGE OF NAME
Recorded 2014-03-13
U.S. INTELLECTUAL PROPERTY SECURITY AGREEMENT (FOR NON-U.S. GRANTORS) - SHORT FORM
Recorded 2012-01-10
from
QIMONDA AG
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2009-11-15
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2009-11-15
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-02-05
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-03-08
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- Patent No.
- US 6,558,883
- App. No.
- 09/801,413
- Filed
- 2001-03-08
- Granted
- 2003-05-06
- Pub. No.
- US20020127501A1
- Examiner
- DUDA, KATHLEEN
- Art Unit
- 1756
- PTA
- -12 days
External Links