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App. No. 10/424,173 · Confirmation No. 1614

PROCESS AND DEVICE FOR CLEANING A SEMICONDUCTOR WAFER

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-12-22 C.AD Change of Address 1 View
2004-11-12 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-08-11 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-08-11 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-08-11 EXIN Examiner Interview Summary Record (PTOL - 413) 1 View
2004-08-11 1449 List of References cited by applicant and considered by examiner 1 View
2004-08-11 BIB Bibliographic Data Sheet 1 View
2004-08-11 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-08-11 FWCLM Index of Claims 1 View
2004-08-11 SRFW Search information including classification, databases and other search related notes 1 View
2004-06-09 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-06-09 CLM Claims 6 View
2004-06-09 REM Applicant Arguments/Remarks Made in an Amendment 11 View
2004-06-09 WFEE Fee Worksheet (SB06) 1 View
2004-03-09 CTNF Non-Final Rejection 7 View
2004-03-09 1449 List of References cited by applicant and considered by examiner 1 View
2004-03-09 892 List of references cited by examiner 1 View
2004-03-09 SRFW Search information including classification, databases and other search related notes 1 View
2004-03-09 FWCLM Index of Claims 1 View
2003-12-15 ELC. Response to Election / Restriction Filed 2 View
2003-12-04 CTRS Requirement for Restriction/Election 4 View
2003-12-04 FWCLM Index of Claims 1 View
2003-06-09 LET. Miscellaneous Incoming Letter 1 View
2003-06-09 OATH Oath or Declaration filed 3 View
2003-04-25 TRNA Transmittal of New Application 2 View
2003-04-25 SPEC Specification 16 View
2003-04-25 CLM Claims 4 View
2003-04-25 ABST Abstract 1 View
2003-04-25 DRW Drawings-only black and white line drawings 3 View
2003-04-25 OATH Oath or Declaration filed 2 View
2003-04-25 WFEE Fee Worksheet (SB06) 1 View
2003-04-25 WFEE Fee Worksheet (SB06) 1 View
2003-04-25 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2003-04-25 FOR Foreign Reference 2 View
2003-04-25 FRPR Certified Copy of Foreign Priority Application 16 View
2003-04-25 FOR Foreign Reference 8 View
2003-04-25 FOR Foreign Reference 6 View
2003-04-25 FOR Foreign Reference 18 View
2003-04-25 FOR Foreign Reference 12 View
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Quick Facts
App. No.
10/424,173
Filed
2003-04-25
Granted
2004-12-21
Pub. No.
US20030186553A1
Examiner
VINH, LAN
Art Unit
1765
PTA
-1 days