IP Library › Granted Patent US 6,743,668
Granted Patent Utility
US 6,743,668 · Confirmation No. 3425

PROCESS FOR FORMING A METAL OXY-NITRIDE DIELECTRIC LAYER BY VARYING THE FLOW RATE OF NITROGEN INTO THE CHAMBER

Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2005-07-09 COCOUT Certificate of Correction - Post Issue Communication 1 View
2005-05-24 COCIN Request for Certificate of Correction 3 View
2004-04-23 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-01-30 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-01-30 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-01-30 1449 List of References cited by applicant and considered by examiner 2 View
2004-01-30 892 List of references cited by examiner 1 View
2004-01-30 FOR Foreign Reference 4 View
2004-01-30 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-01-30 SRFW Search information including classification, databases and other search related notes 1 View
2003-04-29 TRNA Transmittal of New Application 2 View
2003-04-29 A.PE Preliminary Amendment 1 View
2003-04-29 SPEC Specification 15 View
2003-04-29 CLM Claims 7 View
2003-04-29 ABST Abstract 1 View
2003-04-29 DRW Drawings-only black and white line drawings 3 View
2003-04-29 OATH Oath or Declaration filed 3 View
2003-04-29 WFEE Fee Worksheet (SB06) 1 View
2003-04-29 WFEE Fee Worksheet (SB06) 1 View
2003-04-29 WCLM Claims Worksheet (PTO-2022) 1 View
2003-04-29 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,743,668
App. No.
10/425,242
Filed
2003-04-29
Granted
2004-06-01
Pub. No.
US20030205772A1
Examiner
MAI, ANH D
Art Unit
2814
PTA
0 days