Semiconductor device having conductive structures formed near a gate electrode
View Patent ↗A semiconductor device is provided by forming a gate electrode and a dielectric layer below and adjacent the side surfaces of the gate electrode. Relatively thin conductive structures are formed within the dielectric layer. The conductive structures may be used as a floating gate electrode for a memory device. The conductive structures may also be used to control a threshold voltage for a logic device.
1. A semiconductor device, comprising:
a semiconductor substrate comprising a channel region, a source region and a drain region;
a gate electrode having an upper surface and side surfaces;
a dielectric layer formed adjacent the side surfaces of the gate electrode and extending over the source region and drain region; and
at least one silicon structure formed within a portion of the dielectric layer and located near a lower portion of the gate electrode, wherein the at least one silicon structure functions to change a threshold voltage of the semiconductor device based on a voltage applied to the drain region.
2. The semiconductor device of claim 1 , wherein the at least one silicon structure comprises first and second structures, the first structure extending below a first one of the side surfaces of the gate electrode and the second structure extending below a second one of the side surfaces of the gate electrode.
3. The semiconductor device of claim 2 , wherein the first silicon structure is capacitively coupled to the gate electrode and the drain region.
4. A semiconductor device comprising:
a semiconductor substrate comprising a channel region, a source region and a drain region;
a gate electrode having an upper surface and side surfaces;
a dielectric layer formed adjacent the side surfaces of the gate electrode and extending over the source region and drain region; and
at least one silicon structure formed within a portion of the dielectric layer and located near a lower portion of the gate electrode, wherein the at least one silicon structure comprises first and second structures each having a tear drop-like cross-sectional shape, the first structure being disposed near a lower portion of a first one of the side surfaces of the gate electrode and the second structure being disposed near a lower portion of a second one of the side surfaces of the gate electrode.
5. The semiconductor device of claim 1 , wherein the at least one silicon structure comprises at least one of a continuous polysilicon structure or a number of discontinuous pockets of polysilicon.
6. The semiconductor device of claim 1 , wherein the semiconductor substrate comprises a first silicon layer formed on an oxide layer formed on a second silicon layer.
7. A non-volatile memory device, comprising:
a semiconductor substrate comprising a channel region, a source region and a drain region;
a control gate electrode having an upper surface and side surfaces;
a dielectric layer formed on an upper surface of the semiconductor substrate and adjacent the side surfaces of the control gate electrode; and
at least one silicon structure formed within the dielectric layer near a lower portion of the control gate electrode, the at least one silicon structure functioning as a charge storage structure for the non-volatile memory device, wherein the at least one silicon structure has a teardrop-like cross-sectional shape and forms a ring-like structure near the lower portion of the control gate electrode.
8. The non-volatile memory device of claim 7 , wherein the at least one silicon structure comprises a number of polysilicon structures formed in at least one of a continuous or discontinuous manner near each side surface of the control gate electrode.
9. The non-volatile memory device of claim 7 , wherein the dielectric layer comprises an oxide layer and a thickness of a portion of the oxide layer located between the substrate and the at least one silicon structure is less than a thickness of the oxide layer located between the at least one silicon structure and the control gate electrode.
10. The non-volatile memory device of claim 7 , wherein the at least one silicon structure has a cross-sectional size of about 50 Å in length and about 20 Å in height.
11. A semiconductor device, comprising:
a semiconductor substrate;
a source region and a drain region;
a gate electrode having an upper surface and side surfaces;
a dielectric formed adjacent the side surfaces of the gate electrode and above the semiconductor substrate; and
at least one silicon structure formed within a portion of the dielectric, the at least one silicon structure being located near a lower portion of the gate electrode, and wherein the at least one silicon structure enables a threshold voltage of the semiconductor device to be changed based on a voltage applied to the drain region.
12. The semiconductor device of claim 11 , wherein the at least one silicon structure is not located directly below the gate electrode.
13. The semiconductor device of claim 11 , wherein the semiconductor device comprises a logic device.
14. The semiconductor device of claim 11 , wherein the substrate comprises a first semiconducting material formed on an oxide layer formed on a second semiconducting material.