Structure and method for preventing UV radiation damage in a memory cell and improving contact CD control
View Patent ↗According to one exemplary embodiment, a structure comprises a substrate. The structure further comprises at least one memory cell situated on the substrate. The at least one memory cell may be, for example, a SONOS flash memory cell. The structure further comprises an interlayer dielectric layer situated over at least one memory cell and over the substrate. The structure further comprises a first antireflective coating layer situated over the interlayer dielectric layer. According to this exemplary embodiment, the structure further comprises a second antireflective coating layer situated directly over the first anti reflective coating layer. Either the first antireflective coating layer or second antireflective coating layer must be a silicon-rich layer. The first antireflective coating layer and the second antireflective coating may form a UV radiation blocking layer having a UV transparency less than approximately 1.0 percent, for example.
1. A structure comprising:
a substrate;
at least one memory cell situated on said substrate;
an interlayer dielectric layer situated over said at least one memory cell and over said substrate;
a first antireflective coating layer situated over said interlayer dielectric layer;
a second antireflective coating layer situated directly over said first antireflective coating layer;
an oxide cap layer situated over said second antireflective coating layer;
wherein at least one of said first antireflective coating layer and said second antireflective coating layer is a silicon-rich layer.
2. The structure of claim 1 wherein said first antireflective coating layer has a first refraction index and a first absorption coefficient and said second antireflective coating layer has a second refraction index and a second absorption coefficient, said first refraction index and said first absorption coefficient being respectively different than said second refraction index and said second absorption coefficient.
3. The structure of claim 1 wherein said first antireflective layer and said second antireflective layer form a UV radiation blocking layer, said UV radiation blocking layer having a UV transparency less than approximately 1.0 percent.
4. The structure of claim 1 wherein said first antireflective layer is selected from the group consisting of silicon oxynitride, silicon nitride, silicon-rich oxide, and silicon-rich nitride.
5. The structure of claim 1 wherein said second antireflective layer is selected from the group consisting of silicon oxynitride, silicon nitride, silicon-rich nitride, and silicon-rich oxide.
6. The structure of claim 1 wherein each of said first antireflective coating layer and said second antireflective coating layer has a thickness of between approximately 100.0 Angstroms and approximately 500.0 Angstroms.
7. The structure of claim 1 wherein said at least one memory cell is a SONOS flash memory cell.
8. A structure comprising a substrate, at least one memory cell situated on said substrate, an interlayer dielectric layer situated over said at least one memory cell and over said substrate, a first antireflective coating layer situated over said interlayer dielectric layer, said structure being characterized in that:
a second antireflective coating layer is situated directly over said first antireflective coating layer, wherein at least one of said first antireflective coating layer and said second antireflective coating layer is a silicon-rich layer, wherein an oxide cap layer is situated over said second antireflective coating layer.
9. The structure of claim 8 wherein said first antireflective coating layer comprises a first refraction index and a first absorption coefficient and said second antireflective coating layer comprises a second refraction index and a second absorption coefficient, said first refraction index and said first absorption coefficient being respectively different than said second refraction index and said second absorption coefficient.
10. The structure of claim 8 wherein said first antireflective layer and said second antireflective layer form a UV radiation blocking layer, said UV radiation blocking layer having a UV transparency less than approximately 1.0 percent.
11. The structure of claim 8 wherein said first antireflective layer is selected for the group consisting of silicon oxynitride, silicon nitride, silicon-rich oxide, and silicon-rich oxide.
12. The structure of claim 8 wherein said second antireflective layer is selected from the group consisting of silicon oxynitride, silicon nitride, silicon-rich nitride, and silicon-rich oxide.