Dicing/die bonding sheet
View Patent ↗The present invention provides a dicing/die bonding sheet which can be used as a dicing tape during dicing, enables ready separation of the semiconductor element and the adhesive layer from the pressure-sensitive adhesive layer during pickup, and in which the adhesive layer has satisfactory adhesiveness as a die bonding material. A dicing/die bonding sheet in which the pressure-sensitive adhesive layer comprises a compound (A), containing intramolecular, radiation curable carbon-carbon double bonds with an iodine value of 0.5 to 20, and at least one compound (B) selected from a group consisting of polyisocyanates, melamine-formaldehyde resins, and epoxy resins, and the adhesive layer comprises an epoxy resin (a), a phenolic resin (b) with a hydroxyl equivalent of at least 150 g/eq., an epoxy group-containing acrylic copolymer (c), comprising from 0.5 to 6% by weight of glycidyl acrylate or glycidyl methacrylate, and with a weight average molecular weight of at least 100,000, a filler (d), and a curing accelerator (e).
1. A dicing/die bonding sheet comprising a pressure-sensitive adhesive layer and an adhesive layer formed, in that order, on a base film, wherein
said pressure-sensitive adhesive layer comprises a compound (A), containing at least one intramolecular, radiation curable carbon-carbon double bond with an iodine value of 0.5 to 20, and at least one compound (B) selected from a group consisting of polyisocyanates, melamine-formaldehyde resins, and epoxy resins, and
said adhesive layer comprises an epoxy resin (a), a phenolic resin (b) with a hydroxyl equivalent of at least 150 g/eq., an epoxy group-containing acrylic copolymer (c), comprising from 0.5 to 6% by weight of glycidyl acrylate or glycidyl methacrylate, and with a weight average molecular weight of at least 100,000, a filler (d), and a curing accelerator (e).
2. The dicing/die bonding sheet according to claim 1 , wherein a glass transition temperature of said compound (A) is within a range from −70° C. to 0° C.
3. The dicing/die bonding sheet according to claim 1 , wherein a hydroxyl value of said compound (A) is within a range from 5 to 100.
4. The dicing/die bonding sheet according to claim 1 , wherein an acid value of said compound (A) is within a range from 0.5 to 30.
5. The dicing/die bonding sheet according to claim 1 , wherein a hydroxyl value of said compound (A) is within a range from 5 to 100, and an acid value is within a range from 0.5 to 30.
6. The dicing/die bonding sheet according to claim 1 , wherein when a combined weight of said epoxy resin (a) and said phenolic resin (b) is termed X, and a weight of said epoxy group-containing acrylic copolymer (c) is termed Y, then a ratio X/Y is within a range from 0.24 to 1.
7. The dicing/die bonding sheet according to claim 1 , wherein said phenolic resin (b) is represented by a general formula (l):
(wherein, groups R 1 are either identical or different, and each represents a hydrogen atom, a straight chain or branched alkyl group of 1to 10 carbon atoms, a cyclic alkyl group, an aralkyl group, an alkenyl group, a hydroxyl group, an aryl group, or a halogen atom, n represents an integer from 1 to 3, and m represents an integer from 0 to 50).
8. The dicing/die bonding sheet according to claim 1 , wherein an average particle diameter of said filler (d) is within a range from 0.005 μm to 0.1 μm.
9. The dicing/die bonding sheet according to claim 1 , wherein said filler (d) is a silica filler.
10. The dicing/die bonding sheet according to claim 1 , wherein said curing accelerator (e) is an imidazole.
11. The dicing/die bonding sheet according to claim 1 , wherein said epoxy resin (a) has an epoxy equivalent of 100 to 2,000 g/eq.
12. The dicing/die bonding sheet according to claim 1 , wherein said hydroxyl equivalent of the phenolic resin (b) is 150 to 400 g/eq.
13. The dicing/die bonding sheet according to claim 1 , wherein said hydroxyl equivalent of the phenolic resin (b) is 180 to 300 g/eq.
14. The dicing/die bonding sheet according to claim 1 , wherein said hydroxyl equivalent of the phenolic resin (b) is 180 to 250 g/eq.
15. The dicing/die bonding sheet according to claim 1 , wherein after curing, components of said adhesive layer separate to form an islands-in-sea structure.