Electronic structures including conductive shunt layers
View Patent ↗Methods of forming an electronic structure may include forming a seed layer on an electronic substrate, and forming a conductive shunt layer on portions of the seed layer wherein portions of the seed layer are free of the conductive shunt layer. A conductive barrier layer may be formed on the conductive shunt layer opposite the seed layer wherein the conductive shunt layer comprises a first material and wherein the barrier layer comprises a second material different than the first material. Moreover, a solder layer may be formed on the barrier layer opposite the conductive shunt layer wherein the solder layer comprises a third material different than the first and second materials. Related structures are also discussed.
1. An electronic structure comprising:
a conductive pad on a substrate;
an insulating layer on the substrate and on the conductive pad, the insulating layer having a via therein so that a portion of the conductive pad opposite the substrate is free of the insulating layer;
a seed layer on the portion of the conductive pad free of the insulating layer, on sidewalls of the via, and on a surface of the insulating layer opposite the substrate;
a conductive shunt layer on the portion of the conductive pad free of the insulating layer, on sidewalls of the via, and on surface portions of the insulating layer surrounding the via opposite the substrate and the conductive pad, wherein the conductive shunt layer has a thickness of at least approximately 0.5 μm and wherein the conductive shunt layer comprises copper and wherein the seed layer is between the conductive shunt layer and the insulating layer and between the conductive shunt layer and the conductive pad;
a conductive barrier layer on the conductive shunt layer wherein the conductive barrier layer comprises at least one of nickel, platinum, palladium, and/or combinations thereof; and
a solder layer on the conductive barrier layer wherein the conductive shunt layer and the solder layer comprise different materials, wherein the conductive barrier layer is between the conductive shunt layer and the solder layer, wherein the conductive shunt layer, the conductive barrier layer, and the solder layer are on portions of the seed layer, and wherein portions of the seed layer are free of the conductive shunt layer, the conductive barrier layer, and the solder layer.
2. An electronic structure according to claim 1 wherein the solder layer has a rounded surface opposite the conductive shunt layer having the thickness of at least approximately 0.5 μm.
3. An electronic structure according to claim 1 wherein the conductive shunt layer has a thickness in the range of approximately 1.0 μm to 5.0 μm.
4. An electronic structure according to claim 1 further comprising:
a primary conductive trace on the substrate so that the primary conductive trace is between the substrate and the insulating layer; and
an electrical coupling between the primary conductive trace and the conductive pad, the electrical coupling providing at least two separate current flow paths between the primary conductive trace and the conductive pad.
5. An electronic structure according to claim 1 further comprising:
a conductive barrier layer on the conductive shunt layer opposite the conductive pad and the insulating layer wherein the conductive barrier layer comprises at least one of nickel, palladium, platinum, and/or combinations thereof, wherein the solder layer and the barrier layer comprise different materials.
6. An electronic structure according to claim 5 wherein the conductive shunt layer comprises a layer of copper having a thickness of at least approximately 0.5 μm.
7. An electronic structure according to claim 1 wherein the seed layer comprises an adhesion layer of a material different than that of the conductive shunt layer.
8. An electronic structure according to claim 7 wherein the adhesion layer comprises titanium, tungsten, chrome, and/or combinations thereof.
9. An electronic structure according to claim 7 wherein the seed layer comprises a plating conduction layer on the adhesion layer opposite the substrate, wherein the plating conduction layer and the conductive shunt layer comprise a common material.
10. An electronic structure according to claim 1 wherein the conductive shunt layer has a thickness of at least approximately 1.0 μm.
11. An electronic structure comprising:
a conductive pad on a substrate;
an insulating layer on the substrate and on the conductive pad, the insulating layer having a via therein so that a portion of the conductive pad opposite the substrate is free of the insulating layer;
a conductive shunt layer on the portion of the conductive pad free of the insulating layer, on sidewalls of the via, and on surface portions of the insulating layer surrounding the via opposite the substrate and the conductive pad, wherein the conductive shunt layer has a thickness of at least approximately 1.0 μm and wherein the conductive shunt layer comprises copper;
a conductive barrier layer on the conductive shunt layer wherein the conductive barrier layer comprises at least one of nickel, platinum, palladium, and/or combinations thereof; and
a solder layer on the conductive barrier layer, wherein the conductive shunt layer and the solder layer comprise different materials and wherein the conductive barrier layer is between the conductive shunt layer and the solder layer.
12. An electronic structure according to claim 11 further comprising:
a seed layer between the conductive shunt layer and the conductive pad and between the conductive shunt layer and the insulating layer.
13. An electronic structure according to claim 12 wherein the seed layer comprises an adhesion layer of a material different than that of the conductive shunt layer.
14. An electronic structure according to claim 13 wherein the adhesion layer comprises titanium, tungsten, chrome, and/or combinations thereof.
15. An electronic structure according to claim 13 wherein the seed layer comprises a plating conduction layer on the adhesion layer opposite the substrate, wherein the plating conduction layer and the conductive shunt layer comprise a common material.
16. An electronic structure according to claim 12 wherein the conductive shunt layer, the conductive barrier layer, and the solder layer are on portions of the seed layer, and wherein portions of the seed layer are free of the conductive shunt layer, the conductive barrier layer, and the solder layer.
17. An electronic structure according to claim 11 wherein the conductive shunt layer has a thickness in the range of approximately 1.0 μm to 5.0 μm.
18. An electronic structure according to claim 11 further comprising:
a primary conductive trace on the substrate so that the primary conductive trace is between the substrate and the insulating layer; and
an electrical coupling between the primary conductive trace and the conductive pad, the electrical coupling providing at least two separate current flow paths between the primary conductive trace and the conductive pad.