Patent Application
Utility
App. No. 10/627,906
· Confirmation No. 3446
POLYMERIZABLE COMPOSITION, POLYMER, RESIST, AND PROCESS FOR ELECTRON BEAM LITHOGRAPHY
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-07-26 | OATH |
Oath or Declaration filed | 18 | View | |
| 2004-09-07 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-06-03 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-06-03 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-06-03 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-06-03 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-06-03 | CLM |
Claims | 5 | View | |
| 2004-06-03 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-06-03 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-05-14 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2004-05-11 | SRNT |
Examiner's search strategy and results | 31 | View | |
| 2003-12-16 | OATH |
Oath or Declaration filed | 3 | View | |
| 2003-11-14 | OATH |
Oath or Declaration filed | 3 | View | |
| 2003-11-06 | PEFN |
Pre-Exam Formalities Notice | 2 | View | |
| 2003-10-02 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2003-10-02 | PA.. |
Power of Attorney | 1 | View | |
| 2003-10-02 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2003-07-25 | TRNA |
Transmittal of New Application | 2 | View | |
| 2003-07-25 | SPEC |
Specification | 13 | View | |
| 2003-07-25 | CLM |
Claims | 5 | View | |
| 2003-07-25 | ABST |
Abstract | 1 | View | |
| 2003-07-25 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2003-07-25 | OATH |
Oath or Declaration filed | 2 | View | |
| 2003-07-25 | FRPR |
Certified Copy of Foreign Priority Application | 17 | View | |
| 2003-07-25 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-07-25 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Klaus Elian
Bubenreuth, GERMANY
Rafael Abargues
Erlangen, GERMANY
Attorneys & Agents of Record
Classification
USPC
430/270.1
G03F7/0392
G03F7/093
G03F7/2059
Y10S430/114
Y10S430/115
Y10S430/143
Prosecution
- Examiner
- WALKE, AMANDA C
- Art Unit
- 1752
- Customer No.
- 24131
- Docket No.
- M&N-IT-460
- Confirmation No.
- 3446
Foreign Priority
102 34 527.9
·
2002-07-25
·
GERMANY
Publication
- Pub. No.
- US20040081910A1
- Pub. Date
- 2004-04-29
Patent Term Adjustment
-4days
No related applications found.
CORRECTIVE ASSIGNMENT TO CORRECT THE PATENT 7105729 PREVIOUSLY RECORDED AT REEL: 036827 FRAME: 0885. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
Recorded 2017-07-26
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-10-09
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-09-07
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Quick Facts
- App. No.
- 10/627,906
- Filed
- 2003-07-25
- Granted
- 2004-11-23
- Pub. No.
- US20040081910A1
- Examiner
- WALKE, AMANDA C
- Art Unit
- 1752
- PTA
- -4 days
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