Method for forming a ferroelectric capacitor device
View Patent ↗A ferroelectric capacitor device, such as an FeRAM device is formed by forming a substrate extending in a first plane and comprising a number of layers of material, forming a hard mask layer on the substrate and forming a first layer of a first material on the hard mask layer. The hard mask shape is then defined by etching the hard mask layer. A second layer of the first material is deposited on the etched hard mask layer. The deposited second layer has one or more side surfaces extending substantially perpendicular to the plane of the substrate. The second layer and the number of layers forming the substrate are then etched to shape the ferroelectric capacitor device.
1. A method for forming a ferroelectric capacitor device comprising the steps of:
forming a substrate extending in a first plane and comprising a number of layers of material;
forming a hard mask layer on said substrate;
forming a first layer of a first material on said hard mask layer;
etching said first layer of first material and said hard mask layer to define a hard mask shape;
depositing a second layer of said first material over said etched first layer of first material and said etched hard mask layer to enclose said hard mask shape, said deposited second layer having side surfaces extending substantially perpendicular to said plane of said substrate thereby providing a masking structure having sidewalls which are less tapered than the sidewalls of the hard mask shape; and
shaping said ferroelectric capacitor device by etching said second layer and said number of layers forming said substrate.
2. A method according to claim 1 , wherein the step of forming said first layer of said first material on said hard mask layer comprises forming said first layer of a material which has a slow etch rate compared to said hard mask layer material.
3. A method according to claim 1 , wherein the step of forming a first layer of a first material on said hard mask layer comprise forming said first layer of aluminium oxide (Al 2 O 3 ).
4. A method according to claim 1 , wherein the step of forming a first layer of a first material on said hard mask layer comprises forming said first layer of titanium.
5. A method according to claim 1 , wherein the step of forming a first layer of a first material on said hard mask layer comprises forming said first layer of titanium dioxide (TiO 2 ).
6. A method according to claim 1 , wherein the step of forming a first layer of a first material on said hard mask layer comprises forming said first layer of silicon rich oxide (SRO).
7. A method according to claim 1 , wherein the step of forming a hard mask layer on said substrate comprises forming said bard mask layer of TEOS.
8. A method according to claim 1 , wherein the step of forming said substrate comprises forming one or more of said number of layers of iridium.
9. A method according to claim 1 , wherein the step of forming said substrate comprises forming one or more of said number of layers of PZT.
10. A method according to claim 1 , wherein the step of defining the hard mask shape by etching said first layer of first material and said hard mask layer comprises applying a photolithographic layer to said first layer of first material, exposing said photolithographic layer; and developing said exposed photolithographic layer to produce an etch pattern for said first layer of first material and said hard mask layer.
11. A method according to claim 1 , wherein the step of etching said second layer and said number of layers forming said substrate to shape said ferroelectric capacitor device comprises applying an RIB process.
12. A method according to claim 1 , further comprising forming a second layer of hard mask material on said first layer of said first material prior to the step of defining said hard mask shape.
13. A method according to claim 12 , wherein the step of defining said hard mask shape comprises etching said second layer of hard mask material to provide an etch pattern for said first layer of hard mask material.