Method for fabricating metal line of semiconductor device
View Patent ↗The present invention is directed to a method for fabricating a metal line of a semiconductor device. The method comprises the steps of forming an insulation layer, a metal layer and an organic anti-reflection coating in order on a semiconductor substrate on which devices or lower lines are formed, forming a photoresist pattern having an opening of certain width on the organic anti-reflection coating, forming a buffer layer of certain thickness on the photoresist pattern, and selectively removing the metal layer at a lower side of the opening by performing a dry etching process.
1. A method for fabricating a metal line of a semiconductor device, comprising the steps of:
a) forming an insulation layer on a semiconductor substrate on which devices or lower lines are formed;
b) forming a metal layer on the insulation layer;
c) forming a photoresist pattern having an opening of less than or equal to 0.26 μm width on the metal layer, wherein said photoresist has a thickness of less than 9000 Å;
d) forming a buffer layer on the photoresist pattern, including in the opening, wherein the buffer layer comprises an oxide film of PE family; and
e) selectively removing the metal layer at a lower side of the opening by dry etching to form a plurality of metal lines such that a dimension between adjacent metal lines is less than said certain width of said opening.
2. A method for fabricating a metal line of a semiconductor device, comprising the steps of;
a) forming an insulation layer on a semiconductor substrate on which devices or lower lines are formed;
b) forming a metal layer on the insulation layer;
c) forming a photoresist pattern having an opening of less than or equal to 0.26 μm width on the metal layer, wherein said photoresist has a thickness of less than 9000 Å;
d) forming a buffer layer on the photoresist pattern, including in the opening, wherein the buffer layer comprises an oxide film of PE family and has a thickness of 180 to 230 Å; and
e) selectively removing the metal layer at a lower side of the opening by dry etching to form a plurality of metal lines such that a dimension between adjacent metal lines is less than said certain width of said opening.