Method for removing a resist mask with high selectivity to a carbon hard mask used for semiconductor structuring

1. A method for removing a resist from a SiON liner on a hard mask constituted mostly of carbon on a semiconductor substrate, comprising:

providing an etching plasma comprising at least hydrogen at a predetermined temperature level and a predetermined pressure level in a reaction chamber; and

etching the resist selectively to the mask with the plasma for a predetermined period of time.

2. The method according to claim 1 , wherein the etching plasma comprises of a predetermined amount of nitrogen as a diluent.

3. The method according to claim 2 , wherein a ratio of nitrogen to hydrogen is varied starting from a standard nitrogen to hydrogen mixture of 96:4 to a stronger hydrogen rich chemistry based on an intended application.

4. The method according to claim 1 , wherein the etching plasma is comprised of a predetermined amount of CF 4 .

5. The method according to claim 4 , wherein the predetermined amount is less than 5 per cent.

6. The method according to claim 1 , wherein the etching plasma is free of oxygen.

7. The method according to claim 1 , wherein the predetermined pressure level of the etching plasma is in the range of 50 to 300 Pa.

8. The method according to claim 1 , wherein the predetermined temperature is in the range of 150° C. to 350° C.

9. The method according to claim 1 , wherein the resist is a carbon-based photo resist.

10. The method according to claim 1 , wherein the semiconductor substrate is a Si-substrate.

11. The method according to claim 1 , wherein the resist has a selectivity to the mask equal or higher than 10.

12. The method according to claim 1 , wherein the resist is stripped with an across wafer non-uniformity of <3% one sigma.

13. The method according to claim 1 , wherein the resist is stripped completely from the surface of the semiconductor substrate.