Integrated circuit device and method therefor
View Patent ↗A semiconductor device has recesses formed in the substrate during removal of the anti-reflective coating (ARC) because these recess locations are exposed during the etching of the ARC. Although the etchant is chosen to be selective between the ARC material and the substrate material, this selectivity is limited so that recesses do occur. A problem associated with the formation of these recesses is that the source/drains have further to diffuse to become overlapped with the gate. The result is that the transistors may have reduced current drive. The problem is avoided by waiting to perform the ARC removal until at least after formation of a sidewall spacer around the gate. The consequent recess formation thus occurs further from the gate, which results in reducing or eliminating the impediment this recess can cause to the source/drain diffusion that desirably extends to overlap with the gate.
1. A method of forming an integrated circuit device comprising:
providing a semiconductor substrate having a first portion and a second portion;
forming a gate stack comprising:
a gate dielectric formed over the first portion of the semiconductor substrate; and
a gate electrode formed over the gate dielectric;
forming a first patterned anti-reflective coating (ARC) over the gate stack;
forming a non-volatile memory stack comprising:
a charge storage layer formed over the second portion of the semiconductor substrate; and
a first dielectric layer formed over the charge storage layer;
forming a second patterned ARC over the non-volatile memory stack;
forming a second dielectric layer over the gate stack and the non-volatile memory stack;
removing portions of the second dielectric layer to form first spacers adjacent the gate stack and the non-volatile memory stack;
removing the first patterned ARC and the second patterned ARC after removing portions of the second dielectric layer;
forming a first channel under the gate stack; and
forming a second channel under the non-volatile memory stack.
2. The method of claim 1 , further comprising:
forming a third dielectric layer over first spacers;
forming a fourth dielectric layer over the third dielectric layer;
removing portions of the third dielectric layer to form second spacers adjacent the first spacers; and
removing portions of the fourth dielectric layer to form third spacers adjacent the second spacers.
3. The method of claim 2 , wherein removing the first patterned ARC and the second patterned ARC is before forming a third dielectric layer and forming a fourth dielectric layer.
4. The method of claim 3 , wherein the second dielectric layer is densified prior to forming first spacers and removing the first patterned ARC and the second patterned ARC is a wet process.
5. The method of claim 4 , wherein the second dielectric layer is an oxide, the third dielectric layer is an oxide, and the fourth dielectric layer is a nitride.