IP Library Granted Patent US 7,172,927
Granted Patent B2
US 7,172,927 · App. 10/740,303 · Granted Feb 6, 2007

Warpage control of array packaging

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 7,172,927
App. No.
10/740,303
Granted
Feb 6, 2007
Kind
B2
Abstract

During the curing process of the package strips, especially during post encapsulant cure (PEC), undesirable warpage of package strips occurs. A carrier having angled lands and side-insertion clamp structures with angled clamp fins may be used to control this cure-induced warpage of package strips during PEC. In one embodiment, the angled lands and angled side-insertions clamps are used to clamp the edges of the package strip in order to introduce an intentional deformation which counters warpage which occurs during PEC. The angled lands and side-insertion clamps may be at any angle (fixed or adjustable). The side-insertion clamps may be inserted before or after insertion of the package strips into the carrier. Once the package strips are in the carrier and resting on the angled lands, a force may be applied to the side-insertion clamps to clamp the edges of the package strips between a clamp fin and an angled land.

Claims (31)

1. A method for controlling warpage of a package strip during curing, the package strip including a plurality of integrated circuit dies encapsulated on a package substrate, the method comprising:

clamping edges of the package substrate to hold the package substrate in a position to decrease cure-induced warpage of the package substrate during curing of the encapsulant, wherein clamping comprises engaging a major surface portion of the package substrate near an edge of the package substrate with non-zero angled fins disposed at a non-zero angle to the major surface to apply a force to the package substrate to cause an initial deformation to the package substrate to counter an expected cure-induced warpage of the encapsulant on the package substrate;

curing the encapsulant;

releasing the edges of the cured package substrate; and

partially curing the encapsulant before clamping the edges of the package substrate.

2. The method of claim 1 , further comprising:

terminating the application of the force, wherein the terminating is performed after the curing of the encapsulant.

3. The method of claim 1 further comprising:

selecting an angle based on an amount of estimated curing warpage.

4. The method of claim 1 further comprising:

measuring an amount of warpage without applying the force;

selecting an angle based on the amount of measured warpage.

5. The method of claim 1 wherein the clamping comprises:

supporting the package strip on a non-zero angled land of a package strip carrier assembly; and

applying a clamping force to constrain the package strip between the land and a non-zero angled fin.

6. The method of claim 1 wherein the force is applied by at least one of rotating a screw, releasing a spring, and actuating a lever.

7. The method of claim 1 , wherein prior to the clamping the edges of the substrate, the method further comprises:

placing the package substrate into a carrier having non-zero angled lands which are at a non-zero angle as measured from a horizontal axis that is substantially parallel with a top or a bottom of the carrier.

8. The method of claim 7 , wherein the engaging the major surface portion comprises engaging the major surface portion of package substrate near the edge of the package substrate between a non-zero angled fin and a corresponding non-zero angled land, wherein the corresponding non-zero angled fin is substantially parallel to the non-zero angled land.

9. A method for controlling warpage of a package strip during curing, the package strip including a plurality of integrated circuit dies encapsulated on a package substrate, the method comprising:

placing the package strip into a package strip carrier assembly, the package strip carrier assembly having a plurality of non-zero angled lands which are disposed at a non-zero angle with respect to a horizontal axis that is substantially parallel to a first major surface of the package strip;

clamping edges of the package strip between non-zero angled lands of the plurality of non-zero angled lands and corresponding non-zero angled fins that are substantially parallel to the non-zero angled lands to apply a force to the package substrate to cause an initial deformation to the package substrate to counter an expected cure-induced warpage of the encapsulant on the package substrate during curing of the encapsulant;

curing the encapsulant; and

releasing the edges of the cured package substrate.

10. The method of claim 9 , wherein during the clamping, the non-zero angled lands of the plurality of non-zero angled lands engage the first major surface of the package substrate, and the non-zero angled fins engage a second major surface of the package substrate, opposite the first major surface.

11. The method of claim 9 further comprising:

selecting a non-zero angle for the non-zero angled lands and corresponding non-zero angled fins based on an amount of estimated curing warpage.

12. The method of claim 9 further comprising:

measuring an amount of warpage without applying the force;

selecting a non-zero angle for the non-zero angled lands and corresponding non-zero angled fins based on the amount of measured warpage.

13. The method of claim 9 , wherein the horizontal axis is also substantially paralled to a top or a bottom of the package strip carrier assembly.

Assignments (21)
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040925 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Feb 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V. F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 052917/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040928 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Jan 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 052915/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 037486 FRAME 0517. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Dec 10, 2019
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 053547/0421 →
323.01(C) ASSIGNMENT OR CHANGE OF NAME IMPROPERLY FILED AND RECORDED BY ANOTHER PERSON AGAINST OWNER'S PATENT Recorded Oct 3, 2019
From: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 052459/0656 →
CORRECTIVE ASSIGNMENT TO CORRECT THE TO CORRECT THE APPLICATION NO. FROM 13,883,290 TO 13,833,290 PREVIOUSLY RECORDED ON REEL 041703 FRAME 0536. ASSIGNOR(S) HEREBY CONFIRMS THE THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS.. Recorded Feb 20, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: SHENZHEN XINGUODU TECHNOLOGY CO., LTD.
Reel/Frame 048734/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 15, 2017
From: NORTH STAR INNOVATIONS INC.
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 041717/0736 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE PATENTS 8108266 AND 8062324 AND REPLACE THEM WITH 6108266 AND 8060324 PREVIOUSLY RECORDED ON REEL 037518 FRAME 0292. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Feb 1, 2017
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 041703/0536 →
RELEASE OF SECURITY INTEREST Recorded Nov 7, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 040928/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 21, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V., F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 040925/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 4, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: NORTH STAR INNOVATIONS INC.
Reel/Frame 037694/0264 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 13, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037518/0292 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 12, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037486/0517 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037356/0143 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037356/0553 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037354/0225 →
SECURITY AGREEMENT Recorded Nov 6, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 031591/0266 →
SECURITY AGREEMENT Recorded Jun 18, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 030633/0424 →
SECURITY AGREEMENT Recorded May 13, 2010
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 024397/0001 →
SECURITY AGREEMENT Recorded Feb 2, 2007
From: FREESCALE SEMICONDUCTOR, INC.; FREESCALE ACQUISITION CORPORATION; FREESCALE ACQUISITION HOLDINGS CORP.; FREESCALE HOLDINGS (BERMUDA) III, LTD.
To: CITIBANK, N.A. AS COLLATERAL AGENT
Reel/Frame 018855/0129 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 7, 2004
From: MOTOROLA, INC
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 015360/0718 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 18, 2003
From: YUAN, YUAN; CHOPIN, SHEILA F.
To: MOTOROLA, INC.
Reel/Frame 014833/0522 →