Method for formation of an ultra-thin film and semiconductor device containing such a film
View Patent ↗A method of manufacturing an ultra-thin PZT pyrochlore film comprises providing a structure comprising a base layer, and forming on the base layer, a titanium layer and a PZT layer in mutual contact. The structure is annealed to form a PZT pyrochlore layer on said base layer. Novel devices with an ultra-thin PZT layer may thereby be manufactured.
1. A method of manufacturing a field effect transistor, the method comprising forming a drain region and a source region separated by a gate region, forming a titanium layer and a PZT layer in mutual contact and at least partially overlying said gate region, performing an annealing step so that a PZT pyrochlore insulating layer is formed from said titanium layer and said PZT layer and forming a gate electrode above said PZT pyrochlore insulating layer, wherein said titanium layer comprises elemental titanium.
2. The method of claim 1 , wherein said structure is annealed at a temperature of 550° C. to 750° C.
3. The method of claim 1 , wherein the ratio of the thickness of said titanium layer to tat of said PZT layer is 1:3 or more.
4. The method of claim 1 , wherein said structure is annealed at a temperature of 400 ° C. to 800° C.