Detection devices, methods and systems for gas phase materials
View Patent ↗Sensor arrays, methods, and systems for detecting the presence of gas phase materials by the formation of films based on the gas phase material are disclosed. The gas phase materials preferentially deposit conductive films on receptor materials that can be detected. The invention may also provide for increased sensitivity to the deposition of conductive materials through the use of closely spaced conductive electrodes interconnected by lines of receptor material. Examples of gas phase materials that may be detected include RuO 4 , IrO 4 and RhO 4 .
1. A sensor array for detecting a metallic compound in a gas phase material, the array comprising:
a substrate surface;
at least one line of receptor material attached to the substrate surface, wherein a metallic compound in a gas phase material preferentially deposits on the receptor material as compared to the substrate surface surrounding the receptor material; and
at least two electrodes attached to the substrate surface, wherein the at least two electrodes intersect the at least one line of receptor material in multiple locations such that a plurality of potential conductive paths are created between the at least two electrodes are created by the at least one line of receptor material.
2. A sensor array according to claim 1 , wherein the receptor material is located between the substrate surface and the at least two electrodes where the at least one line of receptor material and the at least two electrodes intersect.
3. A sensor array according to claim 1 , wherein the metallic compound in the gas phase material preferentially deposits on the receptor material as compared to the at least two electrodes.
4. A sensor array for detecting a metallic compound in a gas phase material, the array comprising:
a substrate surface;
at least two lines of receptor material attached to the substrate surface, wherein a metallic compound in a gas phase material preferentially deposits on the receptor material as compared to the substrate surface surrounding the receptor material; and
at least two electrodes attached to the substrate surface, wherein the at least two electrodes intersect the at least two lines of receptor material in multiple locations such that a plurality of potential conductive paths are created between the at least two electrodes are created by the at least two lines of receptor material.
5. A sensor array according to claim 4 , wherein according to the at least two lines of receptor material do not intersect each other.
6. A sensor array according to claim 4 , wherein the receptor material is located between the substrate surface and the at least two electrodes where the at least two lines of receptor material and the at least two electrodes intersect.
7. A sensor array according to claim 4 , wherein the metallic compound in the gas phase material preferentially deposits on the receptor material as compared to the at least two electrodes.
8. A method of detecting a metallic compound in a gas phase material, the method comprising:
providing a sensor array comprising:
a substrate surface;
at least one line of receptor material attached to the substrate surface, wherein a metallic compound in a gas phase material preferentially deposits on the receptor material as compared to the substrate surface surrounding the receptor material; and
at least two electrodes attached to the substrate surface, wherein the at least two electrodes intersect the at least one line of receptor material in multiple locations such that a plurality of potential conductive paths are created between the at least two electrodes are created by the at least one line of receptor material;
exposing the sensor array to the gas phase material that comprises the metallic compound; and
monitoring electrical conductivity between the at least two electrodes.
9. A method according to claim 8 , further comprising activating an alarm when the electrical conductivity between the at least two electrodes reaches a predetermined limit.
10. A method according to claim 8 , wherein the receptor material is located between the substrate surface and the at least two electrodes where the at least one line of receptor material and the at least two electrodes intersect.
11. A method according to claim 8 , wherein the metallic compound in the gas phase material preferentially deposits on the receptor material as compared to the at least two electrodes.
12. A method of detecting a metallic compound in a gas phase material, the method comprising:
providing a sensor array comprising:
a substrate surface;
at least two lines of receptor material attached to the substrate surface, wherein a metallic compound in a gas phase material preferentially deposits on the receptor material as compared to the substrate surface surrounding the receptor material; and
at least two electrodes attached to the substrate surface, wherein the at least two electrodes intersect the at least two lines of receptor material in multiple locations such that a plurality of potential conductive paths are created between the at least two electrodes are created by the at least two lines of receptor material;
exposing the sensor array to the gas phase material that comprises the metallic compound; and
monitoring electrical conductivity between the at least two electrodes.
13. A method according to claim 12 , further comprising activating an alarm when the electrical conductivity between the at least two electrodes reaches a predetermined limit.
14. A method according to claim 12 , wherein the at least two lines of receptor material do not intersect each other.
15. A method according to claim 12 , wherein the receptor material is located between the substrate surface and the at least two electrodes where the at least one line of receptor material and the at least two electrodes intersect.
16. A method according to claim 12 , wherein the metallic compound in the gas phase material preferentially deposits on the receptor material as compared to the at least two electrodes.
17. A system for detecting a metallic compound in a gas phase material, the system comprising:
a sensor array comprising:
a substrate surface;
at least one line of receptor material attached to the substrate surface, wherein a metallic compound in a gas phase material preferentially deposits on the receptor material as compared to the substrate surface surrounding the receptor material; and
at least two electrodes attached to the substrate surface, wherein the at least two electrodes intersect the at least one line of receptor material in multiple locations such that a plurality of potential conductive paths are created between the at least two electrodes are created by the at least one line of receptor material; and
a detector in electrical communication with the at least two electrodes.
18. A system according to claim 17 , wherein the receptor material is located between the substrate surface and the at least two electrodes where the at least one line of receptor material and the at least two electrodes intersect.
19. A system according to claim 17 , wherein the metallic compound in the gas phase material preferentially deposits on the receptor material as compared to the at least two electrodes.
20. A system for detecting a metallic compound in a gas phase material, the system comprising:
a sensor array comprising:
a substrate surface;
at least two lines of receptor material attached to the substrate surface, wherein a metallic compound in a gas phase material preferentially deposits on the receptor material as compared to the substrate surface surrounding the receptor material; and
at least two electrodes attached to the substrate surface, wherein the at least two electrodes intersect the at least two lines of receptor material in multiple locations such that a plurality of potential conductive paths are created between the at least two electrodes are created by the at least two lines of receptor material; and
a detector in electrical communication with the at least two electrodes.
21. A system according to claim 20 , wherein the at least two lines of receptor material do not intersect each other.
22. A system according to claim 20 , wherein the receptor material is located between the substrate surface and the at least two electrodes where the at least two lines of receptor material and the at least two electrodes intersect.
23. A system according to claim 20 , wherein the metallic compound in the gas phase material preferentially deposits on the receptor material as compared to the at least two electrodes.
24. A sensor array for detecting a ruthenium compound in a gas phase material, the array comprising:
a substrate surface;
at least one line of receptor material attached to the substrate surface, wherein a ruthenium compound in a gas phase material preferentially deposits on the receptor material as compared to the substrate surface surrounding the receptor material; and
at least two electrodes attached to the substrate surface, wherein the at least two electrodes intersect the at least one line of receptor material in multiple locations such that a plurality of potential conductive paths are created between the at least two electrodes are created by the at least one line of receptor material.
25. A sensor array according to claim 24 , wherein the receptor material is located between the substrate surface and the at least two electrodes where the at least one line of receptor material and the at least two electrodes intersect.
26. A sensor array according to claim 24 , wherein the ruthenium compound in the gas phase material preferentially deposits on the receptor material as compared to the at least two electrodes.
27. A sensor array for detecting a ruthenium compound in a gas phase material, the array comprising:
a substrate surface;
at least two lines of receptor material attached to the substrate surface, wherein a ruthenium compound in a gas phase material preferentially deposits on the receptor material as compared to the substrate surface surrounding the receptor material; and
at least two electrodes attached to the substrate surface, wherein the at least two electrodes intersect the at least two lines of receptor material in multiple locations such that a plurality of potential conductive paths are created between the at least two electrodes are created by the at least two lines of receptor material.
28. A sensor array according to claim 27 , wherein the at least two lines of receptor material do not intersect each other.
29. A sensor array according o claim 27 , wherein the receptor material is located between the substrate surface and the at least two electrodes where the at least two lines of receptor material and the at least two electrodes intersect.
30. A sensor array according to claim 27 , wherein the ruthenium compound in the gas phase material preferentially deposits on the receptor material as compared to the at least two electrodes.
31. A method of detecting a ruthenium compound in a gas phase material, the method comprising:
providing a sensor array comprising:
a substrate surface;
at least one line of receptor material attached to the substrate surface, wherein a ruthenium compound in a gas phase material preferentially deposits on the receptor material as compared to the substrate surface surrounding the receptor material; and
at least two electrodes attached to the substrate surface, wherein the at least two electrodes intersect the at least one line of receptor material in multiple locations such that a plurality of potential conductive paths are created between the at least two electrodes are created by the at least one line of receptor material;
exposing the sensor array to the gas phase material that comprises the ruthenium compound; and
monitoring electrical conductivity between the at least two electrodes.
32. A method according to claim 31 , further comprising activating an alarm when the electrical conductivity between the at least two electrodes reaches a predetermined limit.
33. Method according to claim 31 , wherein the receptor material is located between the substrate surface and the at least two electrodes where the at least one line of receptor material and the at least two electrodes intersect.
34. A method according to claim 31 , wherein the ruthenium compound in the gas phase material preferentially deposits on the receptor material as compared to the at least two electrodes.
35. A method of detecting a ruthenium compound in a gas phase material, the method comprising:
providing a sensor array comprising:
a substrate surface;
at least two lines of receptor material attached to the substrate surface, wherein a ruthenium compound in a gas phase material preferentially deposits on the receptor material as compared to the substrate surface surrounding the receptor material; and
at least two electrodes attached to the substrate surface, wherein the at least two electrodes intersect the at least two lines of receptor material in multiple locations such that a plurality of potential conductive paths are created between the at least two electrodes are created by the at least two lines of receptor material;
exposing the sensor array to the gas phase material that comprises the ruthenium compound; and
monitoring electrical conductivity between the at least two electrodes.
36. A method according to claim 35 , further comprising activating an alarm when the electrical conductivity between the at least two electrodes reaches a predetermined limit.
37. A method according to claim 35 , wherein the at least two lines of receptor material do not intersect each other.
38. A method according to claim 35 , wherein the receptor material is located between the substrate surface and the at least two electrodes where the at least one line of receptor material and the at least two electrodes intersect.
39. A method according to claim 35 , wherein the ruthenium compound in the gas phase material preferentially deposits on the receptor material as compared to the at least two electrodes.
40. A system for detecting a ruthenium compound in a gas phase material, the system comprising:
a sensor array comprising:
a substrate surface;
at least one line of receptor material attached to the substrate surface, wherein a ruthenium compound in a gas phase material preferentially deposits on the receptor material as compared to the substrate surface surrounding the receptor material; and
at least two electrodes attached to the substrate surface, wherein the at least two electrodes intersect the at least one line of receptor material in multiple locations such that a plurality of potential conductive paths are created between the at least two electrodes are created by the at least one line of receptor material; and
a detector in electrical communication with the at least two electrodes.
41. A system according to claim 40 , wherein the receptor material is located between the substrate surface and the at least two electrodes where the at least one line of receptor material and the at least two electrodes intersect.
42. A system according to claim 40 , wherein the ruthenium compound in the gas phase material preferentially deposits on the receptor material as compared to the at least two electrodes.
43. A system for detecting a ruthenium compound in a gas phase material, the system comprising:
a sensor array comprising:
a substrate surface;
at least two lines of receptor material attached to the substrate surface, wherein a ruthenium compound in a gas phase material preferentially deposits on the receptor material as compared to the substrate surface surrounding the receptor material; and
at least two electrodes attached to the substrate surface, wherein the at least two electrodes intersect the at least two lines of receptor material in multiple locations such that a plurality of potential conductive paths are created between the at least two electrodes are created by the at least two lines of receptor material; and
a detector in electrical communication with the at least two electrodes.
44. A system according to claim 43 , wherein the at least two lines of receptor material do not intersect each other.
45. A system according to claim 43 , wherein the receptor material is located between the substrate surface and the at least two electrodes where the at least two lines of receptor material and the at least two electrodes intersect.
46. A system according to claim 43 , wherein the ruthenium compound in the gas phase material preferentially deposits on the receptor material as compared to the at least two electrodes.