Composition for an etching mask comprising a silicon-containing material
View Patent ↗The present invention includes a composition for a silicon-containing material used as an etch mask for underlying layers. More specifically, the silicon-containing material may be used as an etch mask for a patterned imprinted layer comprising protrusions and recessions. To that end, in one embodiment of the present invention, the composition includes a hydroxyl-functional silicone component, a cross-linking component, a catalyst component, and a solvent. This composition allows the silicon-containing material to selectively etch the protrusions and the segments of the patterned imprinting layer in superimposition therewith, while minimizing the etching of the segments in superposition with the recessions, and therefore allowing an in-situ hardened mask to be created by the silicon-containing material, with the hardened mask and the patterned imprinting layer forming a substantially planarized profile.
1. A composition for forming a layer on a surface, said composition comprising:
hydroxyl-functional polysiloxane;
hexamethoxymethylmelamine;
toluenesulfonic acid; and
methyl amyl ketone.
2. The composition as recited in claim 1 wherein said hydroxyl-functional polysiloxane is approximately 4% of said composition, said hexamethoxymethylmelamine is approximately 0.95% of said composition, said toluenesulfonic acid is approximately 0.05% of said composition, and said methyl amyl ketone is approximately 95% of said composition.
3. The composition as recited in claim 1 further including gamma-glycidoxypropyltrimethoxysilane.
4. The composition as recited in claim 3 wherein said hydroxyl-functional polysiloxane is approximately 4% of said composition, said hexamethoxymethylmelamine is approximately 0.7% of said composition, said gamma-glycidoxypropyltrimethoxysilane is approximately 0.25% of said composition, said toluenesulfonic acid is approximately 0.05% of said composition, and said methyl amyl ketone is approximately 95% of said composition.
5. The composition as recited in claim 1 wherein relative proportions of said hydroxyl-functional polysiloxane, hexamethoxymethylmelamine, gamma-glycidoxypropyltrimethoxysilane, said toluenesulfonic acid, and methyl amyl ketone provides said composition with approximately 20% by weight of silicon atoms upon transitioning from a liquid state to a solidified state.