IP Library Granted Patent US 7,156,284
Granted Patent B2
US 7,156,284 · App. 10/790,967 · Granted Jan 2, 2007

Low temperature methods of bonding components and related structures

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Quick Facts
Patent No.
US 7,156,284
App. No.
10/790,967
Granted
Jan 2, 2007
Kind
B2
Abstract

Methods of bonding two components may include positioning the components relative to one another to obtain a desired orientation. Once the desired orientation is obtained, the components can be bonded in the desired orientation with metal wherein a temperature of both components is maintained below a melting temperature of the metal while bonding. Related structures are also discussed.

Claims (89)

1. A method of bonding two components, the method comprising:

positioning the two components relative to one another to obtain a desired orientation; and

bonding the two components in the desired orientation with metal wherein a temperature of both components is maintained below a melting temperature of the metal while bonding wherein bonding comprises providing an electrophoretic coating on the two components wherein the electrophoretic coating comprises the metal and dielectric particles.

2. A method according to claim 1 wherein at least one of the two components comprises a micro-electronic component, an optical component, and/or a micro-mechanical component.

3. A method according to claim 1 wherein at least one of the two components comprises an optical component.

4. A method of bonding two components, the method comprising:

positioning the two components relative to one another to obtain a desired orientation; and

bonding the two components in the desired orientation with metal wherein a temperature of both components is maintained below a melting temperature of the metal while bonding;

wherein bonding comprises providing particles of the metal on the two components and bonding the metal particles;

wherein each of the particles of the metal comprises a dielectric material coated with the metal before bonding the two components.

5. A method according to claim 4 wherein at least one of the two components comprises a micro-electronic component, an optical component, and/or a micro-mechanical component.

6. A method according to claim 4 wherein at least one of the two components comprises an optical component.

7. A method of bonding two components, the method comprising:

positioning the two components relative to one another to obtain a desired orientation; and

bonding the two components in the desired orientation with metal wherein a temperature of both components is maintained below a melting temperature of the metal while bonding;

wherein bonding comprises providing particles of the metal with a dielectric coating thereon on the two components and bonding the metal particles;

wherein bonding the metal particles includes rupturing the dielectric coatings by passing an electric current through the particles.

8. A method according to claim 7 wherein at least one of the two components comprises a micro-electronic component, an optical component, and/or a micro-mechanical component.

9. A method according to claim 7 wherein at least one of the two components comprises an optical component.

10. A method of bonding two components, the method comprising:

positioning the two components relative to one another to obtain a desired orientation; and

bonding the two components in the desired orientation with metal wherein a temperature of both components is maintained below a melting temperature of the metal while bonding;

wherein bonding comprises providing particles of the metal with a coating of a solid material that sublimes at a bonding temperature less than the melting temperature of the metal on the two components and bonding the metal particles.

11. A method according to claim 10 wherein bonding the metal particles comprises allowing diffusion between the metal particles.

12. A method according to claim 11 wherein the metal comprises a metal having a relatively high diffusion rate at room temperature.

13. A method according to claim 12 wherein the metal comprises Indium.

14. A method according to claim 11 wherein providing the particles of the metal comprises providing the particles of the metal with a dielectric coating thereon and wherein bonding the metal particles is preceded by rupturing the dielectric coatings.

15. A method according to claim 11 wherein providing the particles of the metal comprises providing the particles of the metal with a diffusion barrier thereon and wherein bonding the metal particles is preceded by rupturing the diffusion barrier.

16. A method according to claim 10 wherein the solid material comprises one of naphthalene or carbon dioxide.

17. A method according to claim 10 wherein at least one of the two components comprises a micro-electronic component, an optical component, and/or a micro-mechanical component.

18. A method according to claim 10 wherein at least one of the two components comprises an optical component.

19. A method of bonding two components, the method comprising:

positioning the two components relative to one another to obtain a desired orientation; and

bonding the two components in the desired orientation with metal wherein a temperature of both components is maintained below a melting temperature of the metal while bonding;

wherein bonding comprises providing particles of the metal on the two components and bonding the metal particles; and

wherein providing the particles of the metal comprises vibrating the metal particles apart from the two components, and after positioning the components, applying the metal particles to the two components.

20. A method according to claim 19 wherein at least one of the two components comprises a micro-electronic component, an optical component, and/or a micro-mechanical component.

21. A method according to claim 19 wherein at least one of the two components comprises an optical component.

22. A method of bonding two components, the method comprising:

positioning the two components relative to one another to obtain a desired orientation; and

bonding the two components in the desired orientation with metal wherein a temperature of both components is maintained below a melting temperature of the metal while bonding;

wherein bonding comprises providing particles of the metal on the two components and bonding the metal particles; and

wherein bonding the metal particles comprises passing an electrical current through the metal particles sufficient to weld interfaces thereof.

23. A method according to claim 22 wherein at least one of the two components comprises a micro-electronic component, an optical component, and/or a micro-mechanical component.

24. A method according to claim 22 wherein at least one of the two components comprises an optical component.

25. A method of bonding two components, the method comprising:

positioning the two components relative to one another to obtain a desired orientation; and

bonding the two components in the desired orientation with metal wherein a temperature of both components is maintained below a melting temperature of the metal while bonding;

wherein bonding comprises providing particles of the metal on the two components and bonding the metal particles; and

wherein providing the metal particles comprises providing the metal particles in a foam and wherein bonding the metal particles comprises collapsing the foam.

26. A method according to claim 25 wherein at least one of the two components comprises a micro-electronic component, an optical component, and/or a micro-mechanical component.

27. A method according to claim 25 wherein at least one of the two components comprises an optical component.

28. A method of bonding two components, the method comprising:

positioning the two components relative to one another to obtain a desired orientation; and

bonding the two components in the desired orientation with metal wherein a temperature of both components is maintained below a melting temperature of the metal while bonding;

wherein bonding comprises providing particles of the metal on the two components and bonding the metal particles; and

wherein bonding the metal particles comprises introducing a liquid species that amalgamates with the particles at a bonding temperature less than the melting temperature of the metal.

29. A method according to claim 28 wherein the metal comprises silver and the liquid species comprises mercury.

30. A method according to claim 28 wherein at least one of the two components comprises a micro-electronic component, an optical component, and/or a micro-mechanical component.

31. A method according to claim 28 wherein at least one of the two components comprises an optical component.

32. A method of bonding two components, the method comprising:

positioning the two components relative to one another to obtain a desired orientation; and

bonding the two components in the desired orientation with metal wherein a temperature of both components is maintained below a melting temperature of the metal while bonding;

wherein bonding comprises providing particles of the metal on the two components and bonding the metal particles; and

wherein bonding the metal particles comprises corroding the metal particles.

33. A method according to claim 32 wherein corroding the metal particles comprises oxidizing the metal particles.

34. A method according to claim 33 wherein corroding the metal particles comprises galvanically corroding the metal particles.

35. A method according to claim 32 wherein at least one of the two components comprises a micro-electronic component, an optical component, and/or a micro-mechanical component.

36. A method according to claim 32 wherein at least one of the two components comprises an optical component.

37. A method of bonding two components, the method comprising:

positioning the two components relative to one another to obtain a desired orientation; and

bonding the two components in the desired orientation with metal wherein a temperature of both components is maintained below a melting temperature of the metal while bonding;

wherein bonding comprises providing particles of the metal on the two components and bonding the metal particles; and

wherein bonding the metal particles comprises plating a metal on the metal particles after providing the metal particles on the two components.

38. A method according to claim 37 wherein at least one of the two components comprises a micro-electronic component, an optical component, and/or a micro-mechanical component.

39. A method according to claim 37 wherein at least one of the two components comprises an optical component.

40. A method of bonding two components, the method comprising:

positioning the two components relative to one another to obtain a desired orientation; and

bonding the two components in the desired orientation with metal wherein a temperature of both components is maintained below a melting temperature of the metal while bonding;

wherein bonding comprises providing particles of the metal on the two components and bonding the metal particles; and

wherein bonding the metal particles comprises providing a solution of a second metal on the metal particles to initiate a displacement reaction.

41. A method according to claim 40 wherein at least one of the two components comprises a micro-electronic component, an optical component, and/or a micro-mechanical component.

42. A method according to claim 40 wherein at least one of the two components comprises an optical component.

43. A method of bonding two components, the method comprising:

providing particles of a metal on at least one of the two components and vibrating the particles; then

positioning the two components relative to one another to obtain a desired orientation wherein positioning the two components comprises positioning the two components while vibrating the particles; and

bonding the two components in the desired orientation with metal wherein a temperature of both components is maintained below a melting temperature of the metal while bonding wherein bonding the two components comprises ceasing vibrating the particles.

44. A method according to claim 43 wherein at least one of the two components comprises a micro-electronic component, an optical component, and/or a micro-mechanical component.

45. A method according to claim 43 wherein at least one of the two components comprises an optical component.

Assignments (4)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 9, 2020
From: AMKOR TECHNOLOGY, INC.
To: AMKOR TECHNOLOGY SINGAPORE HOLDING PTE.LTD.
Reel/Frame 054067/0135 →
SECURITY INTEREST Recorded Aug 1, 2018
From: AMKOR TECHNOLOGY, INC.
To: BANK OF AMERICA, N.A., AS AGENT
Reel/Frame 046683/0139 →
PATENT SECURITY AGREEMENT Recorded May 7, 2015
From: AMKOR TECHNOLOGY, INC.
To: BANK OF AMERICA, N.A.
Reel/Frame 035613/0592 →
NUNC PRO TUNC ASSIGNMENT EFFECTIVE 11/01/2012 Recorded Jan 9, 2013
From: UNITIVE INTERNATIONAL, LTD.
To: AMKOR TECHNOLOGY, INC.
Reel/Frame 029597/0452 →