IP Library Granted Patent US 7,205,178
Granted Patent B2
US 7,205,178 · App. 10/807,527 · Granted Apr 17, 2007

Land grid array packaged device and method of forming same

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Quick Facts
Patent No.
US 7,205,178
App. No.
10/807,527
Granted
Apr 17, 2007
Kind
B2
Abstract

A method of packaging an integrated circuit die ( 12 ) includes the steps of providing a foil sheet ( 30 ) and forming a layer of solder ( 32 ) on a first side of the foil sheet. A first side of the integrated circuit die is attached to the solder on the foil sheet. The first side of the die has a layer of metal ( 34 ) on it and a second, opposing side of the die includes bonding pads ( 14 ). The bonding pads are electrically connected to the solder on the foil sheet with wires ( 16 ). The die, the electrical connections, and the first side of the foil sheet are encapsulated with a mold compound ( 20 ). The foil sheet is separated from the die and the wires, which forms a packaged integrated circuit ( 10 ).

Claims (44)

1. A method of packaging an integrated circuit die, comprising the steps of:

providing a foil sheet;

forming a single layer of solder on a first side of the foil sheet;

attaching a first side of an integrated circuit die to the single solder layer on the foil sheet, wherein the first side of the die includes a layer of metal thereon and a second, opposing side of the die includes a plurality of bonding pads;

electrically connecting the bonding pads to the single solder layer on the foil sheet with a plurality of wires;

encapsulating the die, the electrical connections, and the first side of the foil sheet with a mold compound; and

separating the foil sheet from the die and the plurality of wires, thereby forming a packaged integrated circuit.

2. The method of packaging an integrated circuit according to claim 1 , wherein the foil sheet comprises a bare metal sheet.

3. The method of packaging an integrated circuit according to claim 2 , wherein the metal sheet comprises one of copper and aluminum.

4. The method of packaging an integrated circuit according to claim 1 , wherein the solder is formed on the foil sheet via a screen printing process.

5. The method of packaging an integrated circuit according to claim 4 , wherein the solder layer has a thickness of about 0.1 mm.

6. The method of packaging an integrated circuit according to claim 1 , further comprising performing a first reflow process after the die attach step, wherein the first reflow process melts the solder. thereby securing the die to the foil sheet.

7. The method of packaging an integrated circuit according to claim 1 , wherein the plurality of wires are attached to the bonding pads and the solder via a wire bonding process.

8. The method of packaging an integrated circuit according to claim 1 , wherein the wirebonding process comprises a ball bonding process.

9. The method of packaging an integrated circuit according to claim 8 , wherein the ball bonding process forms squashed ball bonds having a diameter of about 0.25 mm on the foil sheet, wherein said ball bonds function as package terminals.

10. The method of packaging an integrated circuit according to claim 1 , wherein the wires have a diameter of about 50 um to about 100 um.

11. The method of packaging an integrated circuit according to claim 1 , wherein the foil sheet is separated from the die and the wires via a second reflow process.

12. The method of packaging an integrated circuit according to claim 11 , wherein a portion of the solder remains attached to the wires and the die after the foil sheet is separated therefrom.

13. The method of packaging an integrated circuit according to claim 1 , wherein the more than one die is attached to the foil sheet, and after the foil sheet is separated from the die and the wires, the die and the wires connected to the respective die are separated from each other such that multiple packaged devices are formed substantially simultaneously.

14. A method of forming a plurality of integrated circuit packages, comprising the steps of:

providing a sheet of metal foil;

forming a layer of high temperature solder on a first side of the foil sheet via a screen printing process;

attaching first sides of a plurality of integrated circuit dies to the single solder layer on the foil sheet, wherein the first side of each of the die includes a layer of metal thereon and a second, opposing side of each of the die includes a plurality of bonding pads;

performing a first reflow process for securing the plurality of integrated circuit dies to the metal foil;

electrically connecting the bonding pads to the single solder layer on the foil sheet with a plurality of wires via a wirebonding process, wherein first ends of the wires are attached to the bonding pads and second ends of the wires are attached to the foil sheet;

encapsulating the integrated circuit dies, the electrical connections, and the first side of the foil sheet with a mold compound;

separating the foil sheet and the solder layer from the integrated circuit dies, second ends of the plurality -of wires, and the mold compound via a second reflow process, wherein only a portion of the solder layer is removed from the dies and the second ends of the plurality of wires; and

separating the encapsulated integrated circuit dies and the wires connected thereto from other ones of the encapsulated integrated circuit dies, thereby forming a plurality of packaged integrated circuits.

15. The method of packaging an integrated circuit according to claim 14 , wherein-squashed ball bonds having a diameter of about 0.25 mm are formed on the foil sheet, wherein s-aid ball bonds function as package terminals.

16. The method of forming a plurality of integrated circuit packages of claim 14 , wherein the separating step comprises the step of saw singulating the encapsulated die from adjacent encapsulated dies.

17. A method of forming a multi-chip module, comprising the steps of:

providing a sheet of metal foil;

forming a single layer of high temperature solder on a first side of the foil sheet via a screen printing process;

attaching first sides of at least two integrated circuit dies to the single solder layer on the foil sheet, wherein the first side of each of the die includes a layer of metal thereon and a second, opposing side of each of the die includes a plurality of bonding pads;

performing a first reflow process for securing the at least two integrated circuit dies to the metal foil;

electrically connecting a first portion of the bonding pads of each of the at least two dies to the single solder layer on the foil sheet with a plurality of first wires via a first wirebonding process, wherein first ends of the first wires are attached to the bonding pads and second ends of the first wires are attached to the foil sheet;

electrically connecting the at least two dies to each other by connecting a second portion of the bonding pads of a first one of the die to a second portion of the bonding pads of a second one of the dies with a plurality of second wires via a second wirebonding process;

encapsulating the at least two integrated circuit dies, the electrical connections, and the first side of the foil sheet with a mold compound; and

separating the foil sheet and the solder layer from the at least two integrated circuit dies, second ends of the plurality of first wires, and the mold compound via a second reflow process, wherein only a portion of the solder layer is removed from the at least two dies and the second ends of the plurality of wires.

18. The method of forming a multi-chip module of claim 17 , further comprising the steps of:

saw singulating the encapsulated die from adjacent encapsulated dice.

19. The method of forming a multi-chip module of claim 17 , further comprising the steps of:

attaching a passive device to the solder on the foil sheet; and

electrically connecting the passive device to at least one of the at least two dies, and wherein the passive device is encapsulated with the mold compound.

Assignments (23)
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040925 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Feb 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V. F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 052917/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040928 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Jan 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 052915/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 037486 FRAME 0517. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Dec 10, 2019
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 053547/0421 →
323.01(C) ASSIGNMENT OR CHANGE OF NAME IMPROPERLY FILED AND RECORDED BY ANOTHER PERSON AGAINST OWNER'S PATENT Recorded Oct 3, 2019
From: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 052459/0656 →
CORRECTIVE ASSIGNMENT TO CORRECT THE TO CORRECT THE APPLICATION NO. FROM 13,883,290 TO 13,833,290 PREVIOUSLY RECORDED ON REEL 041703 FRAME 0536. ASSIGNOR(S) HEREBY CONFIRMS THE THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS.. Recorded Feb 20, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: SHENZHEN XINGUODU TECHNOLOGY CO., LTD.
Reel/Frame 048734/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 15, 2017
From: NORTH STAR INNOVATIONS INC.
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 041717/0736 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE PATENTS 8108266 AND 8062324 AND REPLACE THEM WITH 6108266 AND 8060324 PREVIOUSLY RECORDED ON REEL 037518 FRAME 0292. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Feb 1, 2017
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 041703/0536 →
RELEASE OF SECURITY INTEREST Recorded Nov 7, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 040928/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 21, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V., F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 040925/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 4, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: NORTH STAR INNOVATIONS INC.
Reel/Frame 037694/0264 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 13, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037518/0292 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 12, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037486/0517 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037356/0143 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037356/0553 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037354/0655 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037354/0225 →
SECURITY AGREEMENT Recorded Nov 6, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 031591/0266 →
SECURITY AGREEMENT Recorded Jun 18, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 030633/0424 →
SECURITY AGREEMENT Recorded May 13, 2010
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 024397/0001 →
SECURITY AGREEMENT Recorded Nov 1, 2007
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 020045/0448 →
SECURITY AGREEMENT Recorded Feb 2, 2007
From: FREESCALE SEMICONDUCTOR, INC.; FREESCALE ACQUISITION CORPORATION; FREESCALE ACQUISITION HOLDINGS CORP.; FREESCALE HOLDINGS (BERMUDA) III, LTD.
To: CITIBANK, N.A. AS COLLATERAL AGENT
Reel/Frame 018855/0129 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 7, 2004
From: MOTOROLA, INC
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 015360/0718 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 24, 2004
From: SHIU, HEI MING; LEE, KAM FAI; WONG, HO WANG
To: MOTOROLA, INC.
Reel/Frame 015132/0661 →