Methods of forming light-emitting devices having an active region with electrical contacts coupled to opposing surfaces thereof
View Patent ↗A light-emitting device comprises a substrate that has a contact plug extending therethrough between first and second opposing surfaces. An active region is on the first surface, a first electrical contact is on the active region, and a second electrical contact is adjacent to the second surface of the substrate. The contact plug couples the second electrical contact to the active region. Such a configuration may allow electrical contacts to be on opposing sides of a chip, which may increase the number of devices that may be formed on a wafer.
1. A method of forming a light-emitting device, comprising:
forming an active region on a first substrate;
forming a via between first and second opposing surfaces in a second substrate;
forming a contact plug in the via; and
transferring the active region from the first substrate to the second substrate so as to be disposed on the first surface.
2. The method of claim 1 , wherein forming the active region comprises:
forming an n-type layer on the first substrate; and
forming a p-type layer on the n-type layer.
3. The method of claim 1 , further comprising:
forming an ohmic contact layer between the first surface and the active region.
4. The method of claim 3 , wherein forming the via comprises:
etching the second substrate using the ohmic contact layer as an etch stop.
5. The method of claim 4 , wherein etching the second substrate is performed using at least one of the following etching techniques: wet etching, dry etching, and micro-machining.
6. The method of claim 1 , wherein forming the contact plug comprises:
plating the via with gold, silver, a gold alloy, and/or a silver alloy.
7. The method of claim 1 , further comprising:
forming a first electrical contact on the active region; and
forming a second electrical contact that is coupled to the contact plug at the second surface.