High-voltage protection device and process
View Patent ↗A high-voltage circuit protection device includes a p-n junction in a semiconductor substrate that is spaced apart from a first electrode region by a diode region. A semiconductor layer overlies the diode region and is separated therefrom by a dielectric layer. A shallow-doped region resides in the diode region spaced apart from the p-n junction by a predetermined distance. The predetermined distance preferably ranges from about 0 to about 50% of the length of the diode region. A process for fabricating the high-voltage device includes forming the shallow-doped region using a threshold adjustment mask followed by formation of the first electrode region using the semiconductor layer in a self-aligned doping process. The shallow-doped region functions to reduce the clamping voltage of the device.
1. A high-voltage protection device comprising:
a substrate having a well region therein;
first and second electrode regions in the well region and separated by the length of a diode region, the electrode regions being of opposite conductivity type;
a shallow-doped region in the diode region adjacent to the first electrode region and spaced apart from the second electrode region by a predetermined distance no more than about 50% of the diode region length, the shallow-doped region being of a same conductivity type as the first electrode region and shallower in depth than the electrode regions, wherein the shallow-doped region has a doping concentration lower than the doping concentration of the electrode regions; and;
a gate electrode overlying the diode region and shallow-doped region and separated therefrom by a dielectric layer.
2. The protection device of claim 1 including:
a third electrode region in the well region separated from the first electrode region by the length of a second diode region, the first and third electrode regions being of opposite conductivity type;
a second gate electrode overlying the second diode region and separated therefrom by a second dielectric layer; and
a second shallow-doped region in the second diode region adjacent to the first electrode region and spaced apart from the third electrode region by a predetermined distance, the shallow-doped region being of a same conductivity type as the third electrode region and shallower in depth than the first and third electrode regions.
3. The protection device of claim 1 including:
a third electrode region in the well region separated from the second electrode region by the length of a second diode region, the second and third electrode regions being of opposite conductivity type;
a second gate electrode overlying the second diode region and separated therefrom by a second dielectric layer; and
a second shallow-doped region in the second diode region adjacent to the third electrode region and spaced apart from the second electrode region by a predetermined distance, the shallow-doped region being of a same conductivity type as the third electrode region and shallower in depth than the second and third electrode regions.