Dense arrays and charge storage devices

1. A three dimensional nonvolatile device array, comprising:

a plurality of vertically separated device levels, each level comprising an array of TFT EEPROMs, each TFT EEPROM comprising a channel, source and drain regions, and a charge storage region adjacent to the channel region;

a plurality of bit line columns in each device level, each bit line column contacting the source or the drain regions of the TFT EEPROMs;

a plurality of word line rows in each device level; and

at least one interlevel insulating layer located between the device levels;

wherein the plurality of vertically separated device levels comprise a monolithic plurality of vertically separated device levels.

2. The array of claim 1 , wherein the charge storage region of each TFT EEPROM of the array of TFT EEPROMs comprises an ONO dielectric film or an insulating layer containing conductive nanocrystals.

3. The array of claim 1 , wherein the charge storage region of each TFT BEPROM of the array of TFT EEPROMs comprises:

a tunnel dielectric above the channel of each TFT EEPROM;

a floating gate above the tunnel dielectric; and

a control gate dielectric above the floating gate.

4. The array of claim 1 , further comprising:

sidewall spacers located adjacent to sidewalls of a control gate of each TFT EEPROM of the array of TFT EEPROMs, wherein the sidewall spacers have approximately the same height as each control gate of each TFT EEPROM; and

an intergate insulating layer which is located between the sidewall spacers above the source and drain regions of the TFT EEPROMs of the array of TFT EEPROMs in each device level, and wherein the intergate insulating layer has approximately the same height as the sidewall spacers.

5. The array of claim 4 , wherein:

the plurality of word line rows are located on the sidewall spacers and on the intergate insulating layer in each device level; and

the word lines of the plurality of word line rows contact each control gate of each TFT EEPROM of the array of TFT EEPROMs through openings between the sidewall spacers.

6. The array of claim 5 , wherein the plurality of bit line columns in each device level comprise rails which extend under the intergate insulating layer.

7. The array of claim 6 , wherein:

the rails comprise suicide layers over doped semiconductor regions; and

the doped semiconductor regions comprise the source and drain regions of the TFT EEPROMs of the array of TFT EEPROMs in areas where the doped semiconductor regions are located adjacent to the channels of the TFT EEPROMs of the array of TFT EEPROMs.

8. The array of claim 1 , wherein each TFT EEPROM of the array of TFT EEPROMs further comprises a control gate, and wherein the control gate of each TFT BEPROM comprises:

a first portion contacting the charge storage region; and

a second portion above the first portion;

wherein the first and the second portions comprise separately deposited layers.

9. The array of claim 1 , further comprising word line contacts and bit line contacts which connect the word line rows and the bit line columns, respectively with peripheral circuits located in a semiconductor substrate below a first device level of the array.

10. The array of claim 9 , wherein the word line and the bit line contacts extend between plural device layers.

11. The array of claim 1 , wherein:

the array of TFT EEPROMs comprises a plurality of memory cells;

each memory cell of the plurality of memory cells comprises one TFT EEPROM of the array of TFT EEPROMs; and

each memory cell size per bit is about (2F 2 )/N, where F is a minimum feature size and N is a number of device layers in a third dimension and where N>1.

12. The array of claim 1 , wherein the charge storage region of each TFT EEPROM of the array of TFT EEPROMs comprises an ONO dielectric film.

13. The array of claim 1 , wherein:

in at least one device level, the plurality of bit line columns are disposed on an opposite side of the channel of each TFT BEPROM of the array of TFT EEPROMs from the plurality of word line rows; and

the channel of each TFT BEPROM of the array of TFT EEPROMs comprises amorphous silicon or polysilicon.

14. The array of claim 13 , wherein:

the plurality of bit line columns are disposed above the channel of each TFT BEPROM of the array of TFT EEPROMs; and

the plurality of word line rows are disposed below the channel of each TFT EEPROM of the array of TFT EEPROMs.

15. The array of claim 13 , wherein:

the plurality of bit line columns are disposed below the channel of each TFT EEPROM of the array of TFT EEPROMs; and

the plurality of word line rows are disposed above the channel of each TFT EEPROM of the array of TFT EEPROMs.

16. The array of claim 1 , wherein each word line row of the plurality of word line rows contacts control gates of a portion of the TFT EEPROMs of the array of TFT EEPROMs.

17. The array of claim 1 , wherein each word line row of the plurality of word line rows acts as a control gate of a portion of the TFT EEPROMs of the array of TFT EEPROMs.

18. The array of claim 1 , wherein:

the plurality of bit line columns extend substantially perpendicular to a source-channel-drain direction of the TFT EEPROMs of the array of TFT EEPROMs; and

the plurality of word line rows extend substantially parallel to the source-channel-drain direction of the TFT EEPROMs of the array of TFT EEPROMs.

19. The array of claim 1 , wherein the channel of each TFT EEPROM of the array of TFT EEPROMs comprises amorphous silicon.

20. The array of claim 1 , wherein the channel of each TFT EEPROM of the array of TFT EEPROMs comprises polysilicon.