High voltage transistor and method of manufacturing the same
View Patent ↗Provided is a high voltage transistor in a flash memory device comprising: a source/drain junction of a DDD structure consisting of a high-concentration impurity region and a low-concentration impurity region surrounding the high-concentration impurity region, the high-concentration impurity region being formed in parallel with a gate electrode at a distance spaced by a location in which a contact hole is formed, and having a rectangular shape whose width is the same as or wider than that of the contact hole and whose length is the same as or narrower than that of an active region through which the gate electrode passes. Accordingly, a current density to pass the gate electrode neighboring the contact hole portion and a current density to pass the gate electrode at a portion where the contact hole cannot be formed become uniform. A uniform and constant saturation current can be obtained regardless of the number of the contact hole.
1. A high voltage transistor, comprising:
a source/drain junction of a DDD structure consisting of a high-concentration impurity region and a low-concentration impurity region surrounding the high-concentration impurity region, the high-concentration impurity region being formed in parallel with a gate electrode at a distance spaced by a location in which a contact hole is formed,
wherein, the high-concentration impurity region has a rectangular shape whose width is wider than that of the contact hole and whose length is the same as or narrower than width of an active region.
2. The high voltage transistor as claimed in claim 1 , wherein the low-concentration impurity region is formed by implanting phosphorous (P) with energy 60 to 70 keV in a dose of 3E12 to 5E12 atoms/cm 2 .
3. The high voltage transistor as claimed in claim 1 , wherein the high-concentration impurity region is formed by implanting arsenic (As) with energy of 20 to 30 keV in a dose of 2E15 to 5E15 atoms/cm 2 .
4. A high voltage transistor, comprising:
a gate insulating film formed on a semiconductor substrate in an active region defined by an isolation film;
a gate electrode formed on the gate insulating film;
a low-concentration impurity region formed in the semiconductor substrate at both sides of the gate electrode;
a high-concentration impurity region spaced from the gate electrode by a given distance, the high-concentration impurity region being in parallel with the gate electrode and having a rectangular shape whose width is wider than that of the contact hole and whose length is the same as or narrower than width of an active region;
an interlayer insulating film formed on the entire structure including the high-concentration impurity region;
a contact hole formed in the interlayer insulating film, whose bottom becomes a portion of the interlayer insulating film;
a contact plug formed by filling the contact hole with a conductive material; and
a metal wire electrically connected to the contact plug and formed on the interlayer insulating film.
5. The high voltage transistor as claimed in claim 4 , wherein the low-concentration impurity region is formed by implanting phosphorous (P) with energy 60 to 70 keV in a dose of 3E12 to 5E12 atoms/cm 2 .
6. The high voltage transistor as claimed in claim 4 , wherein the high-concentration impurity region is formed by implanting arsenic (As) with energy of 20 to 30 keV in a dose of 2E15 to 5E15 atoms/cm 2 .
7. A method of manufacturing a high voltage transistor, the method comprising:
sequentially forming a gate insulating film and a gate electrode on a predetermined region of a semiconductor substrate;
forming a low-concentration impurity region in the semiconductor substrate at both sides of the gate electrode;
forming a high-concentration impurity region spaced from the gate electrode by a given distance, the high-concentration impurity region being in parallel with the gate electrode;
forming an interlayer insulating film on the entire structure after forming the high-concentration impurity region;
etching a portion of the interlayer insulating film to form a contact hole, thereby exposing a portion of the high-concentration impurity region;
filling the contact hole to form a contact plug; and
forming a metal wire on the interlayer insulating film for electrically connecting to the contact plug;
wherein the high-concentration impurity region has a rectangular shape whose width is wider than that of the contact hole and whose length is the same as or narrower than width of an active region.
8. The method of manufacturing a high voltage transistor as claimed in claim 7 , wherein the low-concentration impurity region is formed by implanting phosphorous (P) with energy 60 to 70 keV in a dose of 3E12 to 5E12 atoms/cm 2 .
9. The method of manufacturing a high voltage transistor as claimed in claim 7 , wherein the high-concentration impurity region is formed by implanting arsenic (As) with energy of 20 to 30 keV in a dose of 2E15 to 5E15 atoms/cm 2 .