Method for forming dielectric layer between gates in flash memory device
View Patent ↗The present invention provides a method for preventing an oxide film from becoming thick due to the reaction of the oxide film and a floating gate in a method for manufacturing a flash memory device having a dielectric layer consisting of at least one oxide film between the floating gate and a control gate. To this end, a Si—F bonding layer is formed on the surface of a silicon film constituting the floating gate. The Si—F bonding layer is annealed in a nitrogen gas atmosphere to form a Si—N bonding layer. A dielectric layer is then formed.
1. A method of manufacturing a flash memory device, comprising the steps of:
forming a silicon film pattern constituting a floating gate;
forming a silicon-fluorine (Si—F) bonding layer on the surface of the silicon film pattern in an atmosphere that fluorine is supplied;
performing an annealing process in a nitrogen atmosphere, thus forming a silicon-nitrogen (Si—N) bonding layer on the surface of the silicon film pattern;
forming a dielectric layer having at least one oxide film on the silicon film pattern having the Si—N bonding layer; and
forming a conductive film for forming a control gate on the dielectric layer.
2. The method as claimed in claim 1 , wherein the Si—F bonding layer is formed using a HF solution.
3. The method as claimed in claim 2 , further comprising the steps of, after the step of forming the silicon film pattern, performing cleaning using a mixed solution of H 2 SO 4 , H 2 O 2 and H 2 O;
performing cleaning using a mixed solution of NH 4 F and HF; and
performing cleaning using a mixed solution of NH 4 OH, H 2 O 2 and H 2 O.
4. The method as claimed in claim 1 , wherein the Si—N bonding layer is formed by performing an annealing process in a NH 3 gas atmosphere.
5. The method as claimed in claim 4 , wherein the step of forming the Si—N bonding layer and the step of forming the dielectric layer are performed in-situ.
6. The method as claimed in claim 5 , wherein the dielectric layer is formed by stacking a lower oxide film, a nitride film and an upper oxide film on the silicon film pattern having the Si—N bonding layer.
7. The method as claimed in claim 6 , wherein the silicon film is formed using an amorphous silicon film.
8. The method as claimed in claim 7 , wherein the silicon film is formed using an amorphous silicon film into which phosphorous (P) is doped.
9. A method of manufacturing a flash memory device, comprising the steps of:
forming a silicon film for forming a floating gate;
forming a silicon-fluorine (Si—F) bonding layer on the surface of the silicon film in an atmosphere that fluorine is supplied;
performing an annealing process in a nitrogen atmosphere, thus forming a silicon-nitrogen (Si—N) bonding layer on the surface of the silicon film;
forming a dielectric layer having at least one oxide film on the silicon film having the Si—N bonding layer;
forming a conductive film for forming a control gate on the dielectric layer;
and
patterning the silicon film having the conductive film, the dielectric layer and the Si—N bonding layer.
10. The method as claimed in claim 9 , wherein the Si—F bonding layer is formed using a HF solution.
11. The method as claimed in claim 9 , wherein the Si—N bonding layer is formed by performing an annealing process in a NH 3 gas atmosphere.
12. The method as claimed in claim 11 , wherein the step of forming the Si—N bonding layer and the step of forming the dielectric layer are performed in-situ.
13. The method as claimed in claim 9 , wherein the dielectric layer is formed by stacking a lower oxide film, a nitride film and an upper oxide film on the silicon film having the Si—N bonding layer.
14. A method of manufacturing a flash memory device, comprising the steps of:
forming a silicon film pattern constituting a floating gate;
performing a cleaning process using HF, thus forming a Si—F bonding layer on the surface of the silicon film pattern;
performing an annealing process in a NH 3 gas atmosphere to form a Si—N bonding layer on the surface of the silicon film pattern;
stacking a lower oxide film, a nitride film and an upper oxide film on the silicon film pattern having the Si—N bonding layer, thus forming a dielectric layer; and
forming a control gate on the dielectric layer.
15. The method as claimed in claim 14 , further comprising the steps of, after the step of forming the silicon film pattern, performing cleaning using a mixed solution of H 2 SO 4 , H 2 O 2 and H 2 O;
performing cleaning using a mixed solution of NH 4 F and HF; and
performing cleaning using a mixed solution of NH 4 OH, H 2 O 2 and H 2 O.