Process for fabrication of a ferrocapacitor
View Patent ↗In a process for fabricating a ferrocapacitor comprising providing ferroelectric PZT elements over an Al 2 O 3 layer, the Al 2 O 3 layer is covered with a seed layer comprising layers of PZT and TiO 2 . Then a thicker layer of PZT is formed over the seed layer and crystallized. By this process, the crystallinity of the thick PZT layer is much improved, and its orientation is improved to be in the (111) direction. Furthermore, the seed layer reduces downward diffraction of Pb from the thick PZT layer, such as through the Al 2 O 3 into a TEOS structure beneath.
1. A method of forming a ferroelectric capacitor comprising forming a crystalline PZT layer by a process including the steps of:
forming a seed layer over a substructure, the seed layer comprising at least one PZT layer and a least one metal oxide layer, the metal oxide layer comprising at least one material selected from the group consisting of TiO 2 , HfO 2 and ZrO 2 , and combinations thereof;
performing at least one first annealing step to crystallize the at least one PZT layer and the at least one metal oxide layer together to form a single seed layer;
depositing a layer of amorphous PZT over the seed layer; and
performing a second annealing step to crystallize the amorphous PZT.
2. A method according to claim 1 in which the lowermost layer of the seed layer is PZT.
3. A method according to claim 1 in which the metal oxide is TiO 2 .
4. A method according to claim 3 in which the lowermost layer of the seed layer is TiO 2 .
5. A method according to claim 1 in which the total thickness of the seed layer is less than or about equal to 10 nm.
6. A method according to claim 1 in which a further metal oxide layer is formed before the seed layer, the seed layer being formed over the further metal oxide layer.
7. A method according to claim 2 in which the seed layer includes a higher proportion of PZT than of Ti.
8. A method according to claim 7 in which the proportion of PZT/Ti in the seed layer is about 3:1.
9. A method according to claim 6 , wherein the further metal oxide layer is TiO 2 formed by rapid thermal annealing of Ti.
10. A method of forming a ferroelectric capacitor comprising forming a crystalline PZT layer by a process including the steps of:
forming a seed layer over a substructure, the seed layer comprising at least one PZT layer and a least one metal oxide layer, the metal oxide layer comprising at least one material selected from the group consisting of TiO 2 , HfO 2 and ZrO 2 , and combinations thereof;
performing at least one first annealing step to crystallize the at least one PZT layer and the at least one metal oxide layer together;
depositing a layer of amorphous PZT over the seed subsequent to said first annealing step layer; and
performing a second annealing step to crystallize the amorphous PZT.
11. A method according to claim 10 in which the lowermost layer of the seed layer is PZT.
12. A method according to claim 10 in which the metal oxide is TiO 2 .
13. A method according to claim 12 in which the lowermost layer of the seed layer is TiO 2 .
14. A method according to claim 10 in which the total thickness of the seed layer is less than or about equal to 10 nm.
15. A method according to claim 10 in which a further metal oxide layer is formed before the seed layer, the seed layer being formed over the further metal oxide layer.
16. A method according to claim 11 in which the seed layer includes a higher proportion of PZT than of Ti.
17. A method according to claim 16 in which the proportion of PZT/Ti in the seed layer is about 3:1.
18. The method to claim 15 wherein the further metal oxide layer is TiO 2 formed by rapid thermal annealing of Ti.