Moat system for an imprint lithography template
View Patent ↗The present invention is directed to a body having a first area and a second area separated by a recess. The recess is dimensioned to reduce, if not prevent, a liquid moving along a surface of the body from traveling between the first and second areas. One or more alignment marks may be positioned within one of the first and second areas. In this manner, the recess functions as a moat by reducing, if not preventing, a quantity of the liquid from being in superimposition with the alignment marks.
1. A template comprising:
a body having a first area and a second area, said second area laying outside of said first area; and
a moat, disposed between said first and second areas, having geometric properties associated therewith including two transversely extending linear segments and an arcuate junction extending therebetween, with said geometric properties being established to minimize ingression into said moat by a liquid.
2. The template as recited in claim 1 wherein said geometric properties include providing said moat a surface having an arcuate junction coupled between two transversely extending linear segments, to minimize shape discontinuities in said surface.
3. The template as recited in claim 1 wherein said properties include providing said moat with a first portion configured to minimize shape discontinuities of said moat and a second portion in which shape discontinuities of said moat are present.
4. The template as recited in claim 1 wherein template includes a mold having a boundary wherein said properties include providing said moat with a first portion configured to minimize shape discontinuities of said moat and a second portion in which shape discontinuities of said moat are present located proximate to said boundary.
5. The template as recited in claim 1 wherein said geometric properties are further established to minimize a quantity of said liquid from being in superimposition with said second area.
6. The template as recited in claim 1 further including alignment marks, with said alignment marks being disposed in said second area.
7. The template as recited in claim 1 further including alignment marks disposed in said second area, wherein said alignment marks are a plurality of protrusions on a surface of said template.
8. The template as recited in claim 1 wherein said moat surrounds said second area.
9. The template as recited in claim 1 wherein said body further includes an additional moat disposed within said first area.
10. A template comprising:
a body having a first area and a second area, said second area laying outside of said first area; and
a moat, disposed between said first and second areas, having a pair of transversely extending linear segments, with an arcuate segment connected therebetween.
11. The template as recited in claim 10 wherein said arcuate segment is further established to prevent said liquid from being in superimposition with said second area.
12. The template as recited in claim 10 wherein said properties include providing said moat with a first portion configured to minimize shape discontinuities of said moat and a second portion in which shape discontinuities of said moat are present.
13. The template as recited in claim 10 wherein template includes a mold having a boundary wherein said properties include providing said moat with a first portion configured to minimize shape discontinuities of said moat and a second portion in which shape discontinuities of said moat are present located proximate to said boundary.
14. The template as recited in claim 10 further including alignment marks, with said alignment marks being disposed in said second area.
15. The template as recited in claim 10 further including alignment marks disposed in said second area, wherein said alignment marks are formed from a first material, wherein said template is formed for a second material being substantially the same as said first material.
16. The template as recited in claim 10 wherein said body further includes an additional moat disposed within said first area surrounding additional alignment marks.
17. A template having alignment marks formed thereon, said template comprising:
a body having a first area, with said alignment marks being disposed in a second area laying outside of said first area; and
a moat, defined by a surface surrounding said template alignment marks, said surface having geometric properties associated therewith including two transversely extending linear segments and an arcuate junction extending therebetween to minimize discontinuities in a shape of said surface.
18. The template as recited in claim 17 wherein said geometric properties are further established to prevent said liquid from being in superimposition with said second area.
19. The template as recited in claim 17 wherein said body further includes an additional moat disposed within said first area surrounding additional alignment marks.
20. A template comprising:
a body having a first area and a second area, said second area laying outside of said first area; and
a moat, disposed between said first and second areas, having geometric properties associated therewith including a surface having an arcuate junction coupled between two transversely extending linear segments to minimize shape discontinuities in said surface, with said geometric properties being established to minimize ingression into said moat by a liquid.
21. A template comprising:
a body having a first area and a second area, said second area laying outside of said first area; and
a moat, disposed between said first and second areas, having geometric properties associated therewith, with said geometric properties being established to minimize ingression into said moat by a liquid, said moat having a first portion configured to minimize shape discontinuities of said moat and a second portion in which shape discontinuities of said moat are present.
22. A template comprising:
a body having a first area and a second area, said second area laying outside of said first area; and
a moat, disposed between said first and second areas, having geometric properties associated therewith, with said geometric properties being established to minimize ingression into said moat by a liquid, said moat having a boundary wherein said properties include providing said moat with a first portion configured to minimize shape discontinuities of said moat and a second portion in which shape discontinuities of said moat are present located proximate to said boundary.