Electronic part mounting substrate and method for producing same
View Patent ↗In a method for producing an electronic part mounting substrate wherein a heat sinking metal base plate 12 is bonded to one side of a ceramic substrate 10 , and one side of a circuit forming metal plate 14 is bonded to the other side thereof, an electronic part 16 being mounted on the other side of the circuit forming metal plate 14 , the ceramic substrate 10 and the electronic part 16 are arranged in a mold so that the ceramic substrate 10 is spaced from the electronic part 16 , and then, a molten metal is injected into the mold so that the molten metal contacts both sides of the ceramic substrate 10 and the electronic part 16 . Then, the mold is cooled to solidify the molten metal, to form a heat sinking metal base plate on one side of the ceramic substrate 10 so that the heat sinking metal base plate is bonded directly to the one side of the ceramic substrate 10 , and to form a circuit forming metal plate on the other side of the ceramic substrate 10 so that one side of the circuit forming metal plate is bonded directly to the other side of the ceramic substrate 10 . When the circuit forming metal plate is formed, the electronic part is bonded directly to the other side of the circuit forming metal plate.
1. A method for producing an electronic part mounting substrate wherein a metal member is bonded to one side of a ceramic substrate, and one side of a metal plate is bonded to the other side of the ceramic substrate, an electronic part being mounted on the other side of the metal plate, said method comprising the steps of:
arranging a ceramic substrate and an electronic part in a mold so that the ceramic substrate is spaced from the electronic part;
injecting a molten metal into the mold so that the molten metal contacts both sides of the ceramic substrate and the electronic part;
cooling the mold to solidify the molten metal, to form a metal member on one side of the ceramic substrate so that the metal member is bonded directly to the one side of the ceramic substrate, and to form a metal plate on the other side of the ceramic substrate so that one side of the metal plate is bonded directly to the other side of the ceramic substrate; and
bonding the electronic part directly to the other side of the metal plate when the metal plate is formed.
2. A method for producing an electronic part mounting substrate as set forth in claim 1 , wherein said electronic part is made of a material which does not produce any alloys or compounds with said molten metal.
3. A method for producing an electronic part mounting substrate as set forth in claim 1 , wherein said electronic part is a semiconductor chip, a resistor chip or a capacitor chip.
4. A method for producing an electronic part mounting substrate as set forth in claim 1 , wherein said electronic part is an SiC chip.
5. A method for producing an electronic part mounting substrate as set forth in claim 1 , wherein said molten metal is molten aluminum or a molten aluminum alloy.
6. A method for producing a power module, comprising the steps of:
mounting a casing having electrodes on an electronic part mounting substrate which is produced by a method for producing an electronic part mounting substrate as set forth in claim 1 and wherein said electronic part is a semiconductor chip;
connecting said electrodes of the casing to said semiconductor chip; and
filling an insulating material in said casing.
7. A method for producing an electronic part mounting substrate as set forth in claim 1 , which further comprises the steps of:
taking a bonding substrate, wherein said ceramic substrate, said metal member, said metal plate and said electronic part are integrated with each other, out of said mold; and
thereafter, forming an etching resist on a surface of said metal plate to form a circuit on said metal plate by etching.
8. A method for producing an electronic part mounting substrate as set forth in claim 7 , wherein said etching is carried out after said metal plate is machined.