Semiconductor component having a contact structure and method of manufacture
View Patent ↗A semiconductor component having a titanium silicide contact structure and a method for manufacturing the semiconductor component. A layer of dielectric material is formed over a semiconductor substrate. An opening having sidewalls is formed in the dielectric layer and exposes a portion of the semiconductor substrate. Titanium silicide is disposed on the dielectric layer, sidewalls, and the exposed portion of the semiconductor substrate. The titanium silicide may be formed by disposing titanium on the dielectric layer, sidewalls, and exposed portion of the semiconductor substrate and reacting the titanium with silane. Alternatively, the titanium silicide may be sputter deposited. A layer of titanium nitride is formed on the titanium silicide. A layer of tungsten is formed on the titanium nitride. The tungsten, titanium nitride, and titanium silicide are polished to form the contact structures.
1. A method for manufacturing a semiconductor component, comprising:
providing a semiconductor substrate having a major surface;
forming a layer of dielectric material over the semiconductor substrate;
forming an opening in the layer of dielectric material, wherein the opening has sidewalls and exposes a portion of the major surface;
sputtering titanium silicide from a titanium silicide target onto the sidewalls and the exposed portion of the major surface to form a layer of titanium silicide having a thickness ranging from about 20 Å to less than 150 Å.
2. The method of claim 1 , further including forming an electrically conductive material in the opening.
3. The method of claim 2 , further including forming a layer of titanium nitride on the titanium silicide.
4. The method of claim 3 , wherein forming the electrically conductive material in the opening further includes forming an electrically conductive material on the titanium nitride.
5. The method of claim 4 , wherein the electrically conductive material is tungsten.