System and method for selectively increasing surface temperature of an object
View Patent ↗A system and method for selectively increasing the thermal effect of a radiant energy source to the surface of an object relative to the substrate is described in the context of rapid thermal processing of semiconductor wafers, and apparatus produced therefrom. A radiation-absorptive atmosphere is introduced between the radiant energy source and the object to increase conductive heat transfer to the surface of the object and reduce the available radiant heat transfer to the substrate, thereby increasing the thermal effect to the surface relative to the substrate.
1. A system comprising:
a heating chamber and a semiconductor wafer placed in the chamber;
a radiation source for emitting radiation at least one wavelength in the range of 0.5 μm to 3.0 μm at the semiconductor wafer, the semiconductor wafer including a surface and a glass layer on the surface; and
a radiation-absorptive atmosphere placed within the chamber, the radiation-absorptive atmosphere including H 2 O to regulate the level of absorptivity of the atmosphere within the heating chamber through a combination of radiation heat transfer from the radiation source and conductive heat transfer from the radiation-absorptive atmosphere to increase a thermal effect delivered to the surface of the semiconductor wafer in relation to a thermal effect delivered to a bulk of the semiconductor wafer to affect reflow of the glass layer in the heating chamber.
2. The system of claim 1 , wherein the radiation-absorptive atmosphere is placed in a path between the radiation source and the semiconductor wafer.
3. The system of claim 1 , wherein the radiation source includes a radiation of at least one wavelength.
4. The system of claim 1 , wherein the radiation-absorptive atmosphere includes at least one radiation-absorptive gas.
5. The system of claim 1 , wherein the radiation-absorptive atmosphere includes at least one radiation-absorptive gas and at least one transparent gas.
6. The system of claim 1 , wherein the radiation-absorptive atmosphere includes at least one gas selected from the group consisting of Ar and N 2 .
7. The system of claim 1 , wherein a pressure of the radiation-absorptive atmosphere within the chamber is below atmospheric.
8. The system of claim 1 , wherein a pressure of the radiation-absorptive atmosphere within the chamber is at or above atmospheric.
9. A system comprising:
a heating chamber and a semiconductor wafer placed in the chamber, the semiconductor wafer including a surface and a glass layer on the surface;
a radiation source for emitting radiation at the semiconductor wafer; and
a radiation-absorptive atmosphere placed within the chamber, the radiation-absorptive atmosphere comprises substantially 10–80 mol % Ar, substantially 10–40 mol % H 2 , and substantially 10–50 mol % H 2 O to regulate the level of absorptivity of the atmosphere within the heating chamber through a combination of radiation heat transfer from the radiation source and conductive heat transfer from the radiation-absorptive atmosphere to increase a thermal effect delivered to the surface of the semiconductor wafer in relation to a thermal effect delivered to a bulk of the semiconductor wafer to affect reflow of the glass layer in the heating chamber.
10. The system of claim 9 , wherein the radiation-absorptive atmosphere is placed in a path between the radiation source and the semiconductor wafer.
11. The system of claim 9 , wherein the radiation source includes a radiation of at least one wavelength.
12. The system of claim 9 , wherein a pressure of the radiation-absorptive atmosphere within the chamber is at least equal to atmospheric.
13. The system of claim 9 , wherein a pressure of the radiation-absorptive atmosphere within the chamber is below atmospheric.
14. A system comprising:
a heating chamber and a semiconductor wafer placed in the chamber, the semiconductor wafer including a surface and a glass layer on the surface;
a radiation source for emitting radiation of at least one wavelength in the range of 0.5 μm to 3.0 μm at the semiconductor wafer; and
a radiation-absorptive atmosphere placed within the chamber, the radiation-absorptive atmosphere including CO 2 to regulate level of absorptivity of the atmosphere within the heating chamber through a combination of radiation heat transfer from the radiation source and conductive heat transfer from the radiation-absorptive atmosphere to increase a thermal effect delivered to the surface of the semiconductor wafer in relation to a thermal effect delivered to a bulk of the semiconductor wafer to affect reflow of the glass layer in the heating chamber.
15. The system of claim 14 , wherein the radiation-absorptive atmosphere is placed in a path between the radiation source and the semiconductor wafer.
16. The system of claim 14 , wherein a pressure of the radiation-absorptive atmosphere within the chamber is at least equal to atmospheric.
17. The system of claim 14 , wherein a pressure of the radiation-absorptive absorptive atmosphere within the chamber is below atmospheric.
18. A system comprising:
a heating chamber and a semiconductor wafer placed in the chamber, the semiconductor wafer including a surface and a glass layer on the surface;
a radiation source for emitting radiation at the semiconductor wafer; and
a radiation-absorptive atmosphere placed within the chamber, the radiation-absorptive atmosphere including a mixture of gases, wherein the radiation-absorptive atmosphere comprises substantially 10–80 mol % Ar, substantially 10–40 mol % H 2 , and substantially 10–50 mol % H 2 O, and wherein the mixture of gases is selected to regulate the level of absorptivity of the atmosphere within the heating chamber through a combination of radiation heat transfer from the radiation source and conductive heat transfer from the radiation-absorptive atmosphere to increase a thermal effect delivered to the surface of the semiconductor wafer in relation to a thermal effect delivered to a bulk of the semiconductor wafer to affect reflow of the glass layer in the heating chamber of 750° C.
19. The system of claim 18 , wherein the radiation-absorptive atmosphere is placed in a path between the radiation source and the semiconductor wafer.
20. The system of claim 18 , wherein the radiation source includes a radiation of at least one wavelength.
21. The system of claim 18 , wherein a pressure of the radiation-absorptive atmosphere within the chamber is at least equal to atmospheric.
22. The system of claim 18 , wherein a pressure of the radiation-absorptive atmosphere within the chamber is below atmospheric.
23. A system comprising:
a heating chamber and a semiconductor wafer placed in the chamber, the semiconductor wafer including a surface and a glass layer on the surface;
a radiation source for emitting radiation of at least one wavelength in the range of 0.5 μm to 3.0 μm at the semiconductor wafer; and
a radiation-absorptive atmosphere placed within the chamber, the radiation-absorptive atmosphere including a mixture of gases, wherein the radiation-absorptive atmosphere comprises substantially 10–80 mol % Ar, substantially 10–40 mol % H 2 , and substantially 10–50 mol % H 2 O, and wherein the mixture of gases is selected to regulate the level of absorptivity of the atmosphere within the heating chamber through a combination of radiation heat transfer from the radiation source and conductive heat transfer from the radiation-absorptive atmosphere to increase a thermal effect delivered to the surface of the semiconductor wafer in relation to a thermal effect delivered to a bulk of the semiconductor wafer to affect reflow of the glass layer in the heating chamber.
24. The system of claim 23 , wherein the radiation-absorptive atmosphere is placed in a path between the radiation source and the semiconductor wafer.
25. The system of claim 23 , wherein a pressure of the radiation-absorptive atmosphere within the chamber is at least equal to atmospheric.
26. The system of claim 23 , wherein a pressure of the radiation-absorptive atmosphere within the chamber is below atmospheric.