Process for sealing plasma-damaged, porous low-k materials
View Patent ↗The invention relates to a process for sealing plasma-damaged, porous low-k materials on Si substrates, in which self-aligning molecules (SAMs) are applied to the low-k material, and then a diffusion barrier is applied to the low-k material. The invention is based on the object of providing a process for sealing plasma-damaged, porous low-k materials on Si substrates, which allows an improved distribution of the SAMs to be achieved, in particular in the case of structures with a high aspect ratio, and which allows the low-k materials to be repaired, dewatered and sealed. According to the invention, this is achieved by virtue of the fact that the deposition of the SAMs is carried out using a supercritical CO 2 process (scCO 2 process), by the wafers being introduced into a process chamber, that CO 2 and SAMs are introduced into the process chamber and the process chamber is pressurized, that the wafers are heated to a temperature of over 35° C. up to 300° C., and that the ambient conditions in the process chamber are maintained for a predetermined period of time.
1. A process for forming a semiconductor device, the process comprising:
providing a semiconductor substrate;
forming a layer of low-k material over the semiconductor substrate;
performing a supercritical CO 2 process to deposit a polymer layer of self-aligning molecules (SAMs) on the low-k material, said polymer layer comprising functional groups A and B, wherein functional group A has a preferential affinity for silicon and functional group B has a preferential affinity for copper, the supercritical CO 2 process including introducing CO 2 and the SAMs comprising group A and group B into a process chamber that includes the semiconductor substrate, pressurizing the process chamber, and heating tile semiconductor substrate to a temperature of over 35° C.; and
forming a diffusion barrier over the low-k material.
2. The process as claimed in claim 1 , wherein pressurizing the process chamber comprises pressurizing to 100–300 bar.
3. The process as claimed in claim 1 , wherein heating the semiconductor substrate comprises heating the semiconductor substrate to around 35–200° C.
4. The process as claimed in claim 1 , wherein ambient conditions for the deposition of the SAMs in the process chamber are maintained for a period of time of about 0.5 to 10 minutes.
5. The process as claimed in claim 1 , wherein performing a supercritical CO 2 process comprises performing a cycle in the process chamber and repeating the cycle one or more times.
6. The process as claimed in claim 1 , further comprising removing at least a portion of the polymer layer prior to forming the barrier layer.
7. The process as claimed in claim 1 , wherein forming the diffusion barrier over the low-k material comprises forming the diffusion barrier over the polymer layer.
8. The process as claimed in claim 1 , and further comprising forming a copper seed layer over the diffusion barrier and depositing a copper layer over the copper seed layer.
9. The process as claimed in claim 8 , wherein the diffusion barrier comprises Ta.
10. The process as claimed in claim 8 , wherein the barrier layer, the copper seed layer and the copper layer are carried out in a cluster tool immediately after the polymer layer deposition.
11. The process as claimed in claim 1 , wherein functional group B is oriented on a metal during deposition of the barrier layer or a Cu seed layer.
12. The process as claimed in claim 1 , wherein the low-k material layer comprises at least one material selected from the group consisting of carbon-doped SiO 2 and a silsesquioxane.
13. The process as claimed in claim 1 , wherein the low-k material layer comprises at least one material selected from the group consisting of hydrogen silsesquioxane (HSQ) or methylsilsesquioxane (MSQ).
14. A process for sealing a plasma-damaged, porous low-k material over a silicon wafer, in which a functional group A of self aligning molecules (SAMs) having a preferential affinity for silicon and a functional group B of self-aligning molecules (SAMs) having a preferential affinity for copper are applied to the low-k material, and then a diffusion barrier is applied to the low-k material, wherein deposition of the SAMs is carried out using a supercritical CO 2 process, where the wafer is introduced into a process chamber, wherein CO 2 and SAMs are introduced into the process chamber and the process chamber is pressurized, wherein the wafers are heated to a temperature of over 35° C. at over 75 bar, and wherein the ambient conditions in the process chamber are maintained for a predetermined period of time.