Copper electrodeposition in microelectronics

1. A method for electroplating Cu onto a substrate having electrical interconnect features in the manufacture of a microelectronic device, the method comprising:

immersing the substrate in an electrolytic solution comprising the following:

a source of Cu ions in an amount sufficient to electrodeposit Cu onto the substrate and into the electrical interconnect features wherein the electrical interconnect features comprise openings of less than about 100 nm and the electrical interconnect features have an aspect ratio (depth:width) of greater than about 4:1;

one or more superfilling agent compounds which promote a Cu deposit in the interconnect features characterized by a rate of growth in the vertical direction which is substantially greater than a rate of growth in the horizontal direction, wherein the superfilling agent compounds are selected from the group consisting of an accelerator, a suppressor, and combinations thereof; and

a leveling agent comprising a substituted pyridyl polymer compound which has a leveling effect without substantially interfering with superfilling, wherein the substituted pyridyl polymer compound is a reaction product obtained by causing (i) a pyridine starting material selected from the group consisting of 4-vinyl pyridine and poly(4-vinylpyridine) to react with (ii) a reagent selected from the group consisting of dimethyl sulfate and methyl tosylate; and

supplying electrical current to the electrolytic solution to deposit Cu onto the substrate.

2. The method of claim 1 wherein the substrate is a semiconductor integrated circuit device substrate with said electrical interconnect features.

3. The method of claim 1 wherein the substituted pyridyl polymer compound is a reaction product of 4-vinyl pyridine and dimethyl sulfate.

4. The method of claim 1 wherein the substituted pyridyl polymer compound has a molecular weight between about 10,000 and 20,000 g/mol.

5. The method of claim 1 wherein the substituted pyridyl polymer compound has a molecular weight between about 60,000 and 160,000 g/mol.

6. The method of claim 1 wherein the electrolytic solution consists essentially of:

the source of Cu ions in an amount sufficient to electrodeposit Cu onto the substrate and into the electrical interconnect features wherein the electrical interconnect features comprise openings of less than about 100 nm and the electrical interconnect features have an aspect ratio (depth:width) of greater than about 4:1;

the one or more superfilling agent compounds which promote a Cu deposit in the interconnect features characterized by a rate of growth in the vertical direction which is substantially greater than a rate of growth in the horizontal direction, wherein the superfilling agent compounds are selected from the group consisting of an accelerator, a suppressor, and combinations thereof; and

the leveling agent comprising a substituted pyridyl polymer compound which has a leveling effect without substantially interfering with superfilling, wherein the substituted pyridyl polymer compound is a reaction product obtained by causing (i) a pyridine starting material selected from the group consisting of 4-vinyl pyridine and poly(4-vinylpyridine) to react with (ii) a reagent selected from the group consisting of dimethyl sulfate and methyl tosylate.

7. The method of claim 1 wherein the leveling agent consists of the substituted pyridyl polymer compound which has a leveling effect without substantially interfering with superfilling, wherein the substituted pyridyl polymer compound is a reaction product obtained by causing (i) a pyridine starting material selected from the group consisting of 4-vinyl pyridine and poly(4-vinylpyridine) to react with (ii) a reagent selected from the group consisting of dimethyl sulfate and methyl tosylate.

8. The method of claim 1 wherein the substituted pyridyl polymer compound is a reaction product of poly(4-vinylpyridine) and methyl tosylate.

9. The method of claim 1 wherein the substituted pyridyl polymer compound is a reaction product of 4-vinyl pyridine and methyl tosylate.