Granted Patent B2

US 7,115,472 · App. 10/964,049 · Granted Oct 3, 2006

Abstract

Claims (69)

1. A process for manufacturing an array of electrically programmable dual charge storage location memory cells, comprising the steps of:

forming insulated gate stripes over a semiconductor substrate;

forming charge-storage elements over the substrate surface and adjacent to sides of the insulated gate stripes, the charge-storage elements comprising a layer of charge-trapping material sandwiched between opposing layers of a dielectric material;

forming side control gates over each of the charge-storage elements;

forming bit line diffusions in the substrate between the insulated gate stripes extending parallel thereto;

forming word lines transversal to the insulated gate stripes electrically connecting the side control gates and the insulated gate stripes; and

removing the insulated gate stripes and the charge-storage elements in regions between the word lines to form physically separated insulated gates and charge-storage elements for the memory cells of the array.

2. The process of claim 1 , wherein one layer of the dielectric material of the charge storage-element lies adjacent to both a portion of the substrate and a portion of a side of the gate stripes, the portion of the charge-storage element adjacent to the substrate forming a base charge-confining layer and the portion adjacent to the gate stripes forming an upright charge-confining layer.

3. A process for manufacturing an array of electrically programmable dual charge storage location memory cells, comprising the steps of:

forming insulated gate stripes over a semiconductor substrate;

forming charge-confining layers stack portions of a dielectric-charge trapping material-dielectric layers stack over the substrate surface at the sides of the insulated gate stripes, the charge trapping material layer in each charge-confining layers stack portion forming a charge storage element;

forming side control gates over each of the charge-confining layers stack portions;

forming bit line diffusions in the substrate between the insulated gate stripes extending parallel thereto;

forming word lines transversal to the insulated gate stripes electrically connecting the side control gates and the insulated gate stripes; and

removing the insulated gate stripes and the charge-confining layers stack portions in regions between the word lines to form physically separated insulated gates and charge-confining layers stack portions for the memory cells of the array,

wherein each of the charge-confining layers stack portions at the sides of the gate has an “L” shape, with a base charge-confining layers stack portion lying on the substrate surface and an upright charge-confining layers stack portion lying against a respective side of the insulated gate.

4. The process according to claim 3 , in which the charge trapping material layer is a layer of silicon nitride.

5. The process according to claim 3 , in which the dielectrics in the charge-confining layers stack portions are silicon oxide.

6. The process according to claim 3 , in which the dielectrics in the charge-confining layers stack portions are a high dielectric constant material.

7. The process according to claim 3 , comprising the steps of, after forming the insulated gate stripes, introducing into the substrate dopants of the first conductivity type using the insulated gate stripes as a mask, to form write enhancement doped regions of the first conductivity type between the insulated gate stripes, the write enhancement region having a doping level higher than that of the substrate.

8. The process according to claim 3 , comprising the steps of:

forming the dielectric-charge trapping material-dielectric layers stack on the insulated gate stripes and on the substrate surface between the insulated gate stripes;

forming a first polysilicon layer on the layers stack, and anisotropically etching the polysilicon layer to form sidewall spacers at the sides of the insulated gate stripes;

introducing dopants of a second conductivity type in the substrate using the sidewall spacers as a mask, to form bit line diffusions between the insulated gate stripes and extending parallel thereto;

depositing a second polysilicon layer and removing the second polysilicon layer and the layers stack down to the insulated gate stripes, thereby leaving charge-confining layers stack portions of the layers stack on the substrate surface between the insulated gate stripes and second polysilicon layer portions filling gaps between the charge-confining layers stack portions and a top surface of the insulated gate stripes;

depositing and patterning a third polysilicon layer to form word lines transversal to the insulated gate stripes;

selectively removing the insulated gate stripes, the sidewall spacers, the charge-confining layers stack portions and the second polysilicon layer portions from regions in between the word lines.

9. The process according to claim 8 , in which said forming second polysilicon layer portions on the sidewall spacers and removing the layers stack from over the insulated gate stripes comprises the steps of:

forming a second polysilicon layer on the layers stack and on the sidewall spacers; and

removing the second polysilicon layer and the layers stack down to the insulated gate stripes, leaving the second polysilicon layer portions to fill recesses at the sides of the sidewall spacers.

10. The process according to claim 9 , in which said removing the second polysilicon layer comprises performing a plasma etch or a chemical-mechanical polishing or a combination thereof.

11. The process according to claim 3 , comprising the steps of:

covering the insulated gate stripes and the substrate surface therebetween with a masking layer;

introducing dopants of a second conductivity type into the substrate to form bit line diffusions extending parallel to the insulated gate stripes, the masking layer causing the bit line diffusions to be spaced apart from the sides of the insulated gate stripes;

removing the masking layer and covering the insulated gate stripes and the substrate surface with the dielectric-charge trapping material-dielectric layers stack;

depositing a first polysilicon layer on the layers stack;

removing the first polysilicon layer and the layers stack down to the insulated gate stripes, leaving charge-confining layers stack portions of the dielectric-charge trapping material-dielectric layers stack covered by first polysilicon layer portions on the substrate surface between the insulated gate stripes;

depositing and patterning a third polysilicon layer to form word lines transversal to the insulated gate stripes; and

selectively removing the insulated gate stripes, the charge-confining layers stack portions and the first polysilicon layer portions from regions in between the word lines.

12. The process according to claim 11 , in which said covering the insulated gate stripes and the substrate surface at the sides of the insulated gate stripes with a masking layer comprises the steps of:

forming on the insulated gate stripes and on the substrate surface between the insulated gate stripes an etch-stop layer intended to act as an etch-stop in the step of removing the masking layer, and

forming on the etch-stop layer the masking layer.

13. The process according to claim 12 , in which said etch-stop layer is an oxide layer and said masking layer is a nitride layer.

14. The process according to claim 9 , in which said removing the first polysilicon layer and the layers stack down to the insulated gate stripes comprises performing a plasma etch or a chemical-mechanical polishing or a combination thereof.

15. The process according to claim 3 , comprising the steps of:

forming the dielectric-charge trapping material-dielectric layers stack on the insulated gate stripes and on the substrate surface therebetween;

depositing a liquid-phase gap-fill material on the layers stack and making the liquid-phase gap-fill material denser, the gap-fill material filling gaps in the layers stack between the insulated gate stripes and the layers stack over the insulated gate stripes, the latter being substantially free of gap-fill material;

removing the layers stack from over the insulated gate stripes using the gap-fill material as a protection to leave charge-confining layers stack portions of the dielectric-charge trapping material-dielectric layers stack in between the insulated gate stripes;

removing the gap-fill material from over the charge-confining layers stack portions;

depositing a first polysilicon layer;

introducing dopants of a second conductivity type into the substrate using the first polysilicon layer as a mask to form bit line diffusions spaced apart from the sides of the insulated gate stripes;

depositing a second polysilicon layer;

patterning the third polysilicon layer and the second polysilicon layer to form word lines transversal to the insulated gate stripes;

selectively removing the insulated gate stripes and the charge-confining layers stack portions from regions in between the word lines.

16. The process according to claim 15 , in which said depositing the liquid-phase gap-fill material comprises depositing the liquid-phase gap-fill material by spinning the substrate.

17. The process according to claim 16 , in which said liquid-phase gap-fill material is a bottom anti-reflecting coating material or a spin-on glass.

18. The process according to claim 3 , comprising the steps of:

forming the dielectric-charge trapping material-dielectric layers stack on the insulated gate stripes and on the substrate surface therebetween;

forming a first polysilicon layer on the layers stack, and etching the polysilicon layer to form sidewall spacers at the sides of the insulated gate stripes;

introducing dopants of a second conductivity type into the substrate using the sidewall spacers as a mask, to form bit line diffusions between the insulated gate stripes extending parallel thereto;

removing the layers stack from over the bit line diffusions;

depositing a dielectric layer, the dielectric layer filling gaps between the insulated gate stripes;

planarizing the structure down to the insulated gate stripes, partially removing a top portion of the insulated gate stripes and of the sidewall spacers to make a top surface thereof substantially flat, gap-filling portions of the dielectric layer filling gaps between the insulated gate stripes;

depositing and patterning a second polysilicon layer to form word lines; and

selectively removing the insulated gate stripes, the sidewall spacers and the dielectric-charge trapping material-dielectric layers stack from regions in between the word lines.

19. The process according to claim 18 , in which said planarizing the structure comprises performing a plasma etch or a chemical-mechanical polishing or a combination thereof.

20. A dual charge storage location electrically programmable memory cell, comprising an insulated gate placed over a semiconductor substrate, physically separated charge-confining layers stack portions of a dielectric-charge trapping material-dielectric layers stack on a substrate surface at the sides of the gate, the charge trapping material layer in each charge-confining layers stack portion forming a floating gate, side control gates over each of the charge-confining layers stack portions, memory cell source/drain regions lateral to the side control gates and an electrical connection element connecting the side control gates to the gate,

wherein each of the charge-confining layers stack portions at the sides of the gate has an “L” shape, with a base charge-confining layers stack portion lying on the substrate surface and an upright charge-confining layers stack portion lying against a respective side of the insulated gate; and

wherein said side control gates are polysilicon sidewall spacers formed at the sides of the insulated gate.

Assignments (11)