Capacitor of semiconductor device and method of manufacturing the same
View Patent ↗A MIM capacitor includes a lower electrode disposed on a semiconductor substrate. A dielectric layer is disposed on the lower electrode to completely cover an exposed surface of the lower electrode. An upper electrode is disposed on the dielectric layer. A method for forming a MIM capacitor includes forming a lower electrode on a semiconductor substrate. A dielectric layer and an upper metal layer are formed on an entire surface of the substrate to cover the lower electrode. The dielectric and upper metal layers are patterned on the lower electrode.
1. A MIM capacitor comprising:
a lower electrode disposed on a semiconductor substrate;
a dielectric layer disposed on the lower electrode to completely cover an exposed surface of the lower electrode; and
an upper electrode disposed on the dielectric layer,
wherein each of the dielectric layer and an upper layer has a curved profile following a topology of the lower electrode, and the lower electrode has a convex half-cylindrical profile and is located between the semiconductor substrate and the dielectric layer.
2. The capacitor according to claim 1 , wherein the dielectric layer comprises at least one of TaO.sub.2, Al.sub.2O3 and SiN.
3. The capacitor according to claim 1 , wherein at least one of the lower and upper electrodes comprises a metal.
4. The capacitor according to claim 3 , wherein the lower and upper electrodes each comprise a metal.
5. The capacitor according to claim 1 , wherein the lower electrode comprises is non-hollow.
6. The capacitor according to claim 1 , wherein the lower electrode has an outer surface with the convex half cylindrical profile.