Integrated semiconductor memory and method for electrically stressing an integrated semiconductor memory
View Patent ↗Semiconductor memories ( 1 ) have segmented word lines ( 5 a, 5 b ), which in each case have a main word line ( 10 a, 10 b ) made of a conductive metal and a plurality of interconnect segments ( 15 a, 15 b ) coupled to the main word line ( 10 a, 10 b ), which are coupled to the respective main word line ( 10 a, 10 b ) in each case via at least one contact hole filling ( 11 ). If one of the contact hole fillings ( 11 ) is defective or at high resistance then functional errors of the semiconductor memory occur. The interconnect segments ( 15 a, 15 b ) of two respective word lines ( 5 a, 5 b ) can be short-circuited in pairs with the aid of switching units ( 20 ), whereby a static current (I) that flows via the contact hole fillings ( 11 ) can be used for electrically stressing the contact hole fillings ( 11 ). Electrical stressing of contact hole fillings of segmented word lines is thus made possible.
1. An integrated semiconductor memory comprising:
a plurality of word lines, each word line having a main word line and a plurality of interconnect segments connected to the main word line, each interconnect segment being coupled to the respective main word line via at least one contact hole filling;
a plurality of memory cells each including a selection transistor having a gate electrode coupled to a word line;
at least one switching unit, by means of which an interconnect segment connected to a first main word line can be short-circuited with an interconnect segment connected to a second main word line; and
a plurality of driver circuits, wherein the interconnect segments are coupled to the driver circuits and the driver circuits are coupled to the main word lines.
2. The semiconductor memory as claimed in claim 1 , wherein the interconnect segments of two respective word lines can be short-circuited with one another in pairs by means of a respective switching unit.
3. The semiconductor memory as claimed in claim 1 , wherein the interconnect segments of a respective word line can be short-circuited with interconnect segments of a respective next word line by means of the switching units.
4. The semiconductor memory as claimed in claim 1 , and further comprising:
a plurality of bit lines arranged within a plurality of blocks of memory cells; and
a plurality of control lines running parallel to the bit lines and being provided between the blocks of memory cells, each control line being coupled to a plurality of switching units.
5. The semiconductor memory as claimed in claim 4 , wherein a respective control line is arranged between adjacent blocks of memory cells.
6. The semiconductor memory as claimed in claim 1 , wherein each switching unit comprises a short-circuiting transistor that includes two source/drain regions coupled to two interconnect segments of two word lines.
7. The semiconductor memory as claimed in claim 1 , wherein two respective word lines can be short-circuited with one another in testwise fashion with the aid of control lines, a static current being conducted from the first main word line via at least one contact hole filling to a first interconnect segment, from the first interconnect segment via a short-circuiting-switched switching unit to the second interconnect segment, and from the second interconnect segment via at least one contact hole filling to the second main word line.
8. The semiconductor memory as claimed in claim 1 , wherein a respective active word line, in a region of an individual interconnect segment, can be short-circuited with a passive word line by means of switching elements.
9. The semiconductor memory as claimed in claim 1 , wherein the interconnect segments comprise polysilicon and the main word lines comprise a metal having a higher conductivity than polysilicon.
10. The semiconductor memory as claimed in claim 7 , wherein a magnitude of the static current is used to indicate a failure in the at least one contact hole filling.
11. The semiconductor memory as claimed in claim 7 , wherein a magnitude of the static current is used to indicate a failure in the at least one contact hole filling during a bum-in test.
12. The semiconductor memory as claimed in claim 1 , wherein the driver circuits are coupled to the main word lines by a respective contact hole filling and to an interconnect segment by a respective further contact hole filling.
13. The semiconductor memory as claimed in claim 1 , wherein two respective interconnect segments of a word line are coupled to the same driver circuit.
14. The semiconductor memory as claimed in claim 1 , wherein a driver circuit and a control line are each arranged between adjacent blocks of memory cells.