Semiconductor component having at least one organic semiconductor layer and method for fabricating the same
View Patent ↗A semiconductor component has at least one organic semiconductor layer. The component also includes at least one protective layer for at least partially covering the at least one organic semiconductor layer to protect against environmental influences. The at least one protective layer contains a proportion of an alkane with C n H 2n+1 and n greater than or equal to 15 or consists entirely of an alkane of this type, or of a mixture of alkanes of this type. In one example, the protective layer is a paraffin wax. This creates a high resistance to moisture.
1. A semiconductor component comprising:
at least one organic semiconductor layer;
at least one protective layer for at least partially covering the at least one organic semiconductor layer, the at least one protective layer containing a proportion of an alkane with C n H 2+1 and n greater than or equal to 15.
2. The semiconductor component as claimed in claim 1 , wherein the protective layer comprises an alkane with C n H 2n+1 .
3. The semiconductor component as claimed in claim 1 , wherein the protective layer comprises a mixture of alkanes with C n H 2n+1 .
4. The semiconductor component as claimed in claim 1 , wherein the protective layer comprises a paraffin wax.
5. The semiconductor component as claimed in claim 1 , wherein the at least one protective layer is between 50 nm and 5 μm thick.
6. The semiconductor component as claimed in claim 1 , wherein a polyvinyl alcohol layer is arranged over the at least one protective layer.
7. The semiconductor component as claimed in claim 1 , wherein the component includes an organic field-effect transistor structure comprising: at least one gate electrode layer;
a gate dielectric layer adjacent the gate electrode layer;
a source layer adjacent the gate electrode layer;
a drain layer adjacent the gate electrode layer; and
an organic semiconductor layer adjacent the gate electrode layer.
8. The semiconductor component as claimed in claim 1 , wherein the organic semiconductor layer includes a proportion of pentacene, oligothiophene and/or a polythiophene.
9. The semiconductor component as claimed in claim 1 , wherein the substrate comprises a flexible material.
10. A method for fabricating a semiconductor component, the method comprising:
forming a component having at least one organic semiconductor layer; and
applying at least one protective layer over at least part of at least one organic semiconductor layer, the at least one protective layer containing a proportion of an alkane with C n H 2n+1 and n greater than or equal to 15.
11. The semiconductor component as claimed in claim 10 , wherein the protective layer comprises an alkane with C n H 2n+1 .
12. The semiconductor component as claimed in claim 10 , wherein the protective layer comprises a mixture of alkanes with C n H 2n+1 .
13. The semiconductor component as claimed in claim 10 , wherein the protective layer comprises a paraffin wax.
14. The method as claimed in claim 10 , wherein at least one protective layer is applied by vapor deposition.
15. The method as claimed in claim 14 , wherein at least one protective layer is deposited from vapor phase at a temperature of between about 80 and about 200°C.
16. The method as claimed in claim 15 , wherein at least one protective layer is deposited at a temperature of between about 120 and about 150°C.
17. The method as claimed in claim 14 , wherein at least one protective layer is deposited in a vacuum vaporizer at a pressure of between about 10 −2 and about 10 −4 torr.
18. The method as claimed in claim 17 , wherein at least one protective layer is deposited in a vacuum vaporizer at a pressure of about 10 −3 torr.
19. The method as claimed in claim 10 , wherein, while the protective layer is being applied, the component below the protective layer is cooled.
20. The method as claimed in claim 19 , wherein the component is cooled to a temperature of between 25 and 50°C.
21. The method as claimed in claim 10 , and further comprising, after applying the at least one protective layer, forming a polyvinyl alcohol layer over the at least one protective layer.
22. The method as claimed in claim 21 , and further comprising using the polyvinyl alcohol layer as an etching mask.